Silicon Carbide Coating Graphite Tray Plate uye Kavha

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VET Energy silicon carbide coating graphite plate uye chivharo ndeyepamusoro-inoshanda chigadzirwa chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwenguva yakareba. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.

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VET EnergySilicon Carbide Coating Graphite Tray, Plate, uye Kavha inogadzirwa kuti iunze mashandiro epamusoro-soro, ichipa kushanda kwakavimbika uye kunoenderana pamusoro pekushandiswa kwakawedzerwa, zvichiita kuti ive sarudzo yakakosha yewafer processing application muindasitiri yesemiconductor. Uku kuita kwepamusoroSilicon Carbide Coating Graphite Plateinozvirumbidza yakasarudzika yekupisa, kufanana kwepamusoro kwemafuta, uye kugadzikana kwemakemikari, kunyanya mumamiriro ekupisa. Kuvakwa kwayo kwepamusoro-kuchena, pamwe nekukura kwekukura kwekukura, kunoita kuti ive yakakosha kune nharaunda dzinoda senge.MOCVD susceptors.

Zvinhu Zvinokosha zveSilicon Carbide Coating Graphite Tray, Plate, uye Kavha

1. High-Temperature Oxidation Resistance:Inomira tembiricha inosvika 1700 ℃, zvichiita kuti iite zvakavimbika mumamiriro ezvinhu akanyanya.

2. Kuchena Kwepamusoro uye Kufanana Kwekupisa:Kuenderana kuchena kwepamusoro uye kunyangwe kugovera kupisa kwakakosha kune MOCVD application.

3. Exceptional Corrosion Resistance:Inopikisa acids, alkalis, munyu, uye akasiyana organic reagents, kuve nechokwadi chekugadzikana kwenguva refu munzvimbo dzakasiyana.

4. Kuoma Kwepamusoro uye Compact Surface:Inoratidzira nzvimbo yakaomeswa ine zvimedu zvakanaka, inovandudza kusimba kwese uye kuramba kupfeka.

5. Hupenyu Hwakawedzerwa Hwebasa:Yakagadzirirwa hupenyu hurefu, inobudirira kupfuura yakajairwasilicon carbide-yakavharwa graphite susceptorsmunzvimbo dzakaomarara semiconductor kugadzirisa.

CVD SiC薄膜基本物理性能 Basic zvemuviri zvimiro zveCVD SiCcoating
性质 / Property	典型数值 / Typical Value
晶体结构 / Crystal Mamiriro	FCC β chikamu多晶，主要為（111）取向
密度 / Density	3.21 g/cm³
硬度 / Kuoma	2500 维氏硬度 (500g mutoro)
晶粒大小 / Zviyo SiZe	2~10μm
纯度 / Kemikari Kuchena	99.99995%
热容 / Kupisa Kugona	640 J·kg^-1·K^-1
升华温度 / Sublimation Temperature	2700 ℃
抗弯强度 / Flexural Simba	415 MPa RT 4-poindi
杨氏模量 / Young's Modulus	430 Gpa 4pt bend, 1300 ℃
导热系数 / ThermalConductivity	300Wm^-1·K^-1
热膨胀系数 / Kuwedzera Kupisa (CTE)	4.5 × 10^-6K^-1

VET Energy's hunyanzvi muCustomized Graphite uye Silicon Carbide Solutions

Semugadziri anovimbika, VET Energy inonyanya kugadzirwa-yakagadzirwa graphite susceptors uye silicon carbide coating mhinduro. Isu tinopa huwandu hwezvigadzirwa zvakagadzirirwa semiconductor uye photovoltaic maindasitiri, kusanganisiraSiC-yakavharwa graphite zvikamusematireyi, ndiro, nemavhavha. Chigadzirwa chedu mutsara unosanganisirawo akasiyana-siyana ekupfekedza sarudzo, sengeSiC coating yeMOCVD, TaC coating, girazi kabhoni coating, uye pyrolytic kabhoni coating, kuve nechokwadi kuti tinosangana nezvinodiwa zvakasiyana zvemaindasitiri epamusoro-soro.

Chikwata chedu chehunyanzvi chehunyanzvi, chinosanganisira nyanzvi kubva kumasangano epamusoro ekutsvagisa dzimba, chinopa mhinduro dzakakwana dzevatengi. Isu tinoramba tichinatsa maitiro edu epamberi, kusanganisira yakasarudzika tekinoroji inosimudzira hukama pakati pesilicon carbide coating uye graphite substrate, kuderedza njodzi yekuvharirwa uye kuwedzera hupenyu hwechigadzirwa.

Zvishandiso uye Mabhenefiti muSemiconductor Manufacturing

TheSilicon Carbide Coating yeMOCVDinoita kuti ma graphite susceptors aya ashande zvakanyanya mukupisa kwepamusoro-soro, nzvimbo dzinoparadza. Ingave yakashandiswa semagraphite wafer carriers kana zvimwe zvikamu zveMOCVD, aya silicon carbide-coated susceptors anoratidza kusimba kwepamusoro uye kushanda. Kune avo vanotsvaga mhinduro dzakavimbika muSiC-yakavharwa graphite susceptormusika, VET Energy's silicon carbide-yakavharwa graphite tray, ndiro, uye chivharo chinopa yakasimba uye inogoneka sarudzo inosangana nekuomarara kudiwa kweiyo semiconductor indasitiri.

Nekutarisa pasainzi yemhando yepamusoro, VET Energy yakazvipira kuendesa yakakwira-performance SiC-yakavharwa graphite mhinduro dzinotyaira hunyanzvi mukugadzirisa semiconductor uye kuve nechokwadi chekuita kwakavimbika mune zvese zvine chekuita neMOCVD zvikumbiro.

VET Energy ndiyo chaiyo inogadzira yakagadziridzwa magirafu uye silicon carbide zvigadzirwa zvine machira akasiyana seSiC coating, TaC coating, girazi kabhoni coating, pyrolytic kabhoni coating, nezvimwewo, inogona kupa akasiyana akagadziridzwa zvikamu zve semiconductor uye photovoltaic indasitiri.

Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

Isu tinoramba tichigadzira maitiro epamberi ekupa zvimwe zvepamberi zvinhu, uye takagadzira yakasarudzika tekinoroji, iyo inogona kuita kuti chisungo pakati pekupotera neiyo substrate ive yakasimba uye isinganyanye kubatwa.

Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!