Chokutanga pane zvose, tinofanira kuzivaPECVD(Plasma Enhanced Chemical Vapor Deposition). Plasma ndiko kuwedzera kwekupisa kwekufamba kwemamorekuru. Iko kudhumhana pakati pavo kuchaita kuti mamorekuru egasi ave ionized, uye zvinhu zvichava musanganiswa weiyo yakasununguka inofamba yakanaka ayoni, maerekitironi uye zvidimbu zvisina kwazvakarerekera zvinodyidzana.
Inofungidzirwa kuti ratidziro yekurasikirwa kwechiedza pane iyo silicon pamusoro yakakwira senge 35%. Iyo anti-reflection firimu inogona kuvandudza zvakanyanya mwero wekushandiswa kwechiedza chezuva nebhatiri sero, iyo inobatsira kuwedzera iyo photogenerated ikozvino density uye nekudaro inovandudza kutendeuka kushanda zvakanaka. Panguva imwecheteyo, iyo haidhirojeni iri mufirimu inodarika pamusoro pesero rebhatiri, inoderedza chiyero chekudzokorora kwepamusoro peiyo emitter junction, inoderedza rima razvino, inowedzera yakavhurika yedunhu voltage, uye inovandudza iyo photoelectric shanduko inoshanda. Kupisa kwepamusoro-pakarepo kuvharwa mukupisa-kuburikidza kunotyora mamwe maSi-H neNH zvisungo, uye iyo yakasunungurwa H inowedzera kusimbisa kupfuudza kwebhatiri.
Sezvo photovoltaic-giredhi silicon zvinhu zvisingadzivirirwe zvine huwandu hukuru hwekusachena uye hurema, iyo diki yekutakura hupenyu hwese uye kupararira kureba musilicon inoderedzwa, zvichikonzera kudzikira kwekushandura kugona kwebhatiri. H inogona kuita nekuremara kana kusvibiswa musilicon, nekudaro ichiendesa iyo simba bhendi mubhendi mubhendi revalence kana conduction bhendi.
1. PECVD Principle
Iyo PECVD sisitimu inotevedzana majenareta anoshandisaPECVD graphite boat uye high-frequency plasma exciters. Iyo jenareta yeplasma inoiswa zvakananga pakati peplate yekuputira kuti iite pasi pekumanikidzwa kwakaderera uye tembiricha yakakwira. Iwo anoshanda magasi anoshandiswa silane SiH4 uye ammonia NH3. Aya magasi anoshanda pasilicon nitride yakachengetwa pasilicon wafer. Different refractive indices inogona kuwanikwa nekushandura chiyero che silane kune ammonia. Munguva yekuisa dhizaini, huwandu hukuru hwemaatomu ehydrogen nemaioni ehydrogen anogadzirwa, zvichiita kuti hydrogen passivation yewafer yakanaka kwazvo. Muvacuum uye tembiricha yakadzikama ye480 degrees Celsius, chidimbu cheSixNy chinoputirwa pamusoro pesilicon wafer nekuitisaPECVD graphite boat.
3SiH4+4NH3 → Si3N4+12H2
2. Si3N4
Rudzi rweSi3N4 firimu rinoshanduka nekukora kwayo. Kazhinji, ukobvu hwakakodzera huri pakati pe75 ne80 nm, inoratidzika kunge yakasviba bhuruu. Iyo refractive index yeSi3N4 firimu iri nani pakati pe2.0 uye 2.5. Doro rinowanzo shandiswa kuyera refractive index yayo.
Yakanakisa yepasi passivation mhedzisiro, inobudirira optical anti-reflection performance (ukobvu refractive index matching), yakaderera tembiricha maitiro (zvinonyatso kudzikisa mutengo), uye inogadzirwa H ions inopfuudza iyo silicon wafer pamusoro.
3. Nyaya dzakajairwa mukupfekedza musangano
Firimu ukobvu:
Nguva yekuisa inosiyana kune akasiyana firimu makobvu. Nguva yekuisa inofanira kuwedzerwa kana kudzikiswa zvakakodzera zvichienderana nemuvara wejasi. Kana iyo firimu ichena, nguva yekuisa inofanira kuderedzwa. Kana iri tsvuku, inofanira kuwedzerwa zvakakodzera. Igwa rimwe nerimwe remafirimu rinofanirwa kusimbiswa zvizere, uye zvigadzirwa zvakakanganisika hazvibvumidzwe kuyerera mune inotevera maitiro. Semuyenzaniso, kana kukoira kuri kushoma, senge makwapa eruvara uye mawatermark, iyo inonyanya kuchena nzvimbo, musiyano wemavara, uye mavara machena pamutsetse wekugadzira unofanirwa kutorwa nenguva. Kuchena kwepamusoro kunonyanya kukonzerwa nefirimu yakakora yesilicon nitride, iyo inogona kugadziriswa nekugadzirisa nguva yekuisa firimu; iyo firimu yemusiyano wemavara inonyanya kukonzerwa nekuvharika kwegasi nzira, quartz tube leakage, microwave kutadza, nezvimwe; mavara machena anonyanya kukonzerwa nediki diki dema mune yakapfuura process. Kuongorora kwe reflectivity, refractive index, nezvimwewo, kuchengetedzwa kwemagasi anokosha, nezvimwe.
Mavara machena pamusoro:
PECVD inzira yakakosha mumasero ezuva uye chiratidzo chakakosha chekushanda kwekambani masero ezuva. Iyo PECVD maitiro anowanzo kubatikana, uye batch yega yega maseru inoda kuongororwa. Kune akawanda ekuputira machubhu echoto, uye imwe neimwe chubhu kazhinji ine mazana emasero (zvichienderana nemidziyo). Mushure mekushandura maparamita ekuita, kutenderera kwekusimbisa kwakareba. Coating tekinoroji tekinoroji iyo iyo yese photovoltaic indasitiri inonamira kukosha kukuru kwairi. Kushanda kwemasero ezuva kunogona kuvandudzwa nekuvandudza tekinoroji yekupfeka. Mune ramangwana, solar cell surface tekinoroji inogona kuve budiriro mune theoretical kugona kwemasero ezuva.
Nguva yekutumira: Zvita-23-2024