SiC Coating Graphite MOCVD Wafer Carriers Susceptors

Tsanangudzo Pfupi

VET Energy SiC Coated MOCVD Susceptor yeEpitaxial Kukura chigadzirwa chepamusoro chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwenguva yakareba. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.

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SiC yekuputira graphite MOCVD Wafer vatakuri / susceptor

Yese yedu susceptors yakagadzirwa nepamusoro-simba isostatic graphite. Batsirwa kubva pakuchena kwepamusoro kwemagraphite edu - akagadziridzwa zvakanyanya kune zvinonetsa maitiro senge epitaxy, crystal kukura, ion implantation uye plasma etching, pamwe nekugadzira machipisi e LED.

Zvimiro zvezvigadzirwa zvedu:

1. High tembiricha oxidation kuramba kusvika 1700 ℃.
2. Kuchena kwepamusoro uye kufanana kwekupisa
3. Yakanakisa corrosion resistance: acid, alkali, munyu uye organic reagents.
4. Kuoma kwepamusoro, compact surface, yakanaka particles.
5. Hupenyu hurefu hwebasa uye hunogara kwenguva refu

CVD SiC薄膜基本物理性能 Basic zvemuviri zvimiro zveCVD SiCcoating
性质 / Property	典型数值 / Typical Value
晶体结构 / Crystal Mamiriro	FCC β chikamu多晶，主要為（111）取向
密度 / Density	3.21 g/cm³
硬度 / Kuoma	2500 维氏硬度 (500g mutoro)
晶粒大小 / Zviyo SiZe	2~10μm
纯度 / Kemikari Kuchena	99.99995%
热容 / Kupisa Kugona	640 J·kg^-1·K^-1
升华温度 / Sublimation Temperature	2700 ℃
抗弯强度 / Flexural Simba	415 MPa RT 4-poindi
杨氏模量 / Young's Modulus	430 Gpa 4pt bend, 1300 ℃
导热系数 / ThermalConductivity	300Wm^-1·K^-1
热膨胀系数 / Kuwedzera Kupisa (CTE)	4.5 × 10^-6K^-1

VET Energy ndiyo chaiyo inogadzira yakagadziridzwa magirafu uye silicon carbide zvigadzirwa zvine machira akasiyana seSiC coating, TaC coating, girazi kabhoni coating, pyrolytic kabhoni coating, nezvimwewo, inogona kupa akasiyana akagadziridzwa zvikamu zve semiconductor uye photovoltaic indasitiri.

Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.

Isu tinoramba tichigadzira maitiro epamberi ekupa zvimwe zvepamberi zvinhu, uye takagadzira yakasarudzika tekinoroji, iyo inogona kuita kuti chisungo pakati pekupotera neiyo substrate ive yakasimba uye isinganyanye kubatwa.

Tikugashirei noushamwari kuti ushanyire fekitari yedu, ngativei neimwe hurukuro!