MOCVD Substrate Heater, Heating Elements yeMOCVD

Tsanangudzo Pfupi:

Chemical Graphite

Advantage: High tembiricha kuramba

Kushandisa:MOCVD/Vacuum furnace/Hot Zone

Hukuru Density:1.68-1.91g/cm3

Flexural simba: 30-46Mpa

Kuramba:7-12μΩm

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MOCVD Substrate Heater, Heating Elements yeMOCVD

Graphite hita:
Ma graphite heater components anoshandiswa muchoto chekushisa chepamusoro uye tembiricha inosvika 2200 degree pavacuum nharaunda uye 3000 degree munzvimbo ine deoxidized uye yakaiswa gasi.
Zvinonyanya kukosha zve graphite heater:
1. kufanana kwekupisa chimiro.
2. yakanaka conductivity yemagetsi uye mutoro mukuru wemagetsi.
3. corrosion resistance.
4. inoxidizability.
5. kuchena kwemakemikari yakakwirira.
6. high mechanical simba.
Iyo inobatsira isimba rinoshanda, kukosha kwepamusoro uye kuderera kwekugadzirisa.
Tinogona kuburitsa anti-oxidation uye hupenyu hurefu hurefu hwe graphite crucible, graphite mold uye zvese zvikamu zve graphite heater.
Zvikamu zvikuru zve graphite heater:

Kutsanangurwa Kwehunyanzvi	VET-M3
Hukuru Density (g/cm3)	≥1.85
Zvemukati zveMadota (PPM)	≤500
Shore Hardness	≥45
Chaicho Kuramba (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Saizi yezviyo (μm)	≤43
Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6

Graphite heater yevira remagetsi ine zvimiro zvekudzivirira kupisa, oxidation kuramba, yakanaka conductivity yemagetsi uye nani mechanic intensity. Isu tinokwanisa muchina akasiyana marudzi egraphite heater zvinoenderana nemagadzirirwo evatengi.