Nzira yekuchenesa sei PECVD graphite boat?| VET Energy

1. Kutenda usati wachenesa

1) Kana iyoPECVD graphite chikepe/ mutakuri anoshandiswa kupfuura 100 kusvika ku150 nguva, mushandisi anofanira kutarisa mamiriro ekupfeka nenguva. Kana paine chipfeko chisina kujairika, chinoda kucheneswa nekusimbiswa. Iyo yakajairwa yekuvhara ruvara rwesilicon wafer mugraphite boat/carrier ndeyebhuruu. Kana jira risina bhuruu, mavara akawanda, kana kusiyana kwemavara pakati pezvimedu zvakakura, ijasi risina kujairika, uye chikonzero chekusagadzikana chinoda kusimbiswa nenguva.
2) Mushure mekuita kwevashandi vanoongorora mamiriro ekupfeka eiyoPECVD graphite chikepe/ mutakuri, ivo vachaona kana chikepe chegirafu chichida kucheneswa uye kana kadhi yekadhi inoda kuchinjwa, uye girafu chikepe / mutakuri anoda kucheneswa achapiwa kune vashandi vezvigadzirwa zvekuchenesa.

 

3) Pashure pachographite boat/ mutakuri akakuvadzwa, vashandi vekugadzira vanotora zvese zvimedu zvesilicon muchikepe chegraphite uye kushandisa CDA (yakadzvanywa mweya) kuronga zvidimbu muchikepe.graphite boat. Mushure mekupedza, vashandi vemidziyo vanoisimudza mutangi reasidhi rakagadzirirwa neimwe chikamu cheHF mhinduro yekuchenesa.

 

2. Kucheneswa kwechikepe chegraphite

Inokurudzirwa kushandisa 15-25% hydrofluoric acid mhinduro yezvikamu zvitatu zvekuchenesa, imwe neimwe kwemaawa 4-5, uye nguva nenguva inoputika nitrogen panguva yekunyorova uye kuchenesa, kuwedzera inenge hafu yeawa yekuchenesa; chiziviso: hazvikurudzirwe kushandisa mweya zvakananga segasi sosi yekubhubhura. Mushure mekunhonga, simbura nemvura yakachena kwemaawa angangoita gumi, uye simbisa kuti chikepe chanyatsocheneswa. Mushure mekuchenesa, ndapota tarisa pamusoro pechikepe, iyo graphite kadhi poindi uye yechikepe sheet sheet, uye zvimwe zvikamu kuti uone kana paine silicon nitride yakasara. Zvadaro woomesa maererano nezvinodiwa.

3. Kuchenesa zvidziviriro

A) Sezvo HF asidhi iri chinhu chinoodza zvakanyanya uye iine kumwe kusagadzikana, ine njodzi kune vanoshanda. Naizvozvo, vanoshanda panzvimbo yekuchenesa vanofanirwa kutora matanho ekuchengetedza uye kutungamirwa nemunhu akazvipira.

B) Inokurudzirwa kuparadzanisa chikepe uye kuchenesa chete chikamu chegirafu panguva yekuchenesa, kuitira kuti chikamu chega chega chigone kucheneswa zvakanyanya. Parizvino, vagadziri vazhinji vekumba vanoshandisa kuchenesa kwese, kuri nyore, asi nekuti HF asidhi inoodza kune zvikamu zveceramic, kucheneswa kwese kunopfupisa hupenyu hwesevhisi yezvikamu zvinoenderana.