4 Inch GaN kuri SiC Wafer

Ibisobanuro bigufi:

VET Energy ya santimetero 4 GaN kuri SiC wafer nigicuruzwa cyimpinduramatwara mubijyanye na electronics power. Iyi wafer ikomatanya ubushyuhe bwiza bwa karubide ya silicon (SiC) hamwe nubucucike bukabije hamwe no gutakaza nitride ya gallium (GaN), bigatuma ihitamo neza mugukora ibikoresho byihuta cyane, bifite ingufu nyinshi. Ingufu za VET zitanga imikorere myiza kandi ihamye ya wafer ikoresheje tekinoroji ya MOCVD igezweho.


Ibicuruzwa birambuye

Ibicuruzwa

Umurongo wibicuruzwa bya VET ntabwo bigarukira kuri GaN kuri wafers ya SiC. Dutanga kandi ibikoresho byinshi bya semiconductor substrate, harimo Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, nibindi. Byongeye kandi, turimo guteza imbere cyane ibikoresho bishya bigari bya semiconductor, nka Gallium Oxide Ga2O3 na AlN Wafer, kugirango uhuze ejo hazaza ingufu za elegitoroniki yinganda zikenewe kubikoresho bikora neza.

Ingufu za VET zitanga serivisi zoroshye zo kwihindura, kandi zirashobora guhitamo ibice bya epitaxial ya GaN yubunini butandukanye, ubwoko butandukanye bwa doping, nubunini bwa wafer butandukanye ukurikije ibyo abakiriya bakeneye. Mubyongeyeho, turatanga kandi ubufasha bwa tekiniki bwumwuga na nyuma yo kugurisha kugirango dufashe abakiriya gutezimbere byihuse ibikoresho bya elegitoroniki bikora cyane.

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KUBONA UMWIHARIKO

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo

8-Inch

6-Inch

4-Inch

nP

n-Pm

n-Zab

SI

SI

TTV (GBIR)

≤6um

≤6um

Umuheto (GF3YFCD) -Agaciro keza

≤15μm

≤15μm

≤25μm

≤15μm

Intambara (GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV (SBIR) -10mmx10mm

<2 mm

Wafer Edge

Beveling

BURUNDU

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo

8-Inch

6-Inch

4-Inch

nP

n-Pm

n-Zab

SI

SI

Kurangiza

Impande ebyiri Optical Polonye, ​​Si- Isura CMP

Ubuso

(10um x 10um) Si-FaceRa≤0.2nm
C-Isura Ra≤ 0.5nm

(5umx5um) Si-Isura Ra≤0.2nm
C-Isura Ra≤0.5nm

Imipira

Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm)

Ibimenyetso

Nta na kimwe cyemewe

Igishushanyo (Si-Isura)

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer

Ibice

Nta na kimwe cyemewe

Guhezwa

3mm

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