Nigute ushobora gusukura ubwato bwa PECVD ite | Ingufu za VET

1. Gushimira mbere yo gukora isuku

1) IyoPECVD ubwato bwa grafite/ umwikorezi akoreshwa inshuro zirenga 100 kugeza kuri 150, uyikoresha agomba kugenzura imiterere yatwikiriye mugihe. Niba hari igifuniko kidasanzwe, kigomba gusukurwa no kwemezwa. Ibara risanzwe ryibara rya silicon wafer muri grafite ya bwato / umutwara ni ubururu. Niba wafer ifite ubururu butari ubururu, amabara menshi, cyangwa itandukaniro ryamabara hagati ya wafer nini, ni igifuniko kidasanzwe, kandi igitera ubusanzwe gikeneye kwemezwa mugihe.
2) Nyuma yimikorere abakozi basesengura imiterere ya coating yaPECVD ubwato bwa grafite/ umwikorezi, bazamenya niba ubwato bwa grafite bugomba gusukurwa kandi niba ikarita igomba gusimburwa, kandi ubwato bwa grafite / ubwikorezi bugomba gusukurwa buzashyikirizwa abakozi bashinzwe ibikoresho kugirango basukure.

 

3) Nyuma yaubwato bwa grafite/ umwikorezi yangiritse, abakozi bashinzwe umusaruro bazakuramo wafer yose ya silicon mubwato bwa grafite hanyuma bakoreshe CDA (umwuka ucanye) kugirango batondekanye ibice muriubwato bwa grafite. Nyuma yo kurangiza, abakozi b'ibikoresho bazayizamura mu kigega cya aside cyateguwe hamwe nigice runaka cyumuti wa HF kugirango usukure.

 

2. Isuku yubwato bwa grafite

Birasabwa gukoresha umuti wa hydrofluoric 15-25% mugice cya gatatu cyogusukura, buriwese mumasaha 4-5, hamwe na azote rimwe na rimwe mugihe cyo koga no gukora isuku, ukongeraho hafi igice cyisaha yisuku; icyitonderwa: ntibisabwa gukoresha umwuka muburyo butaziguye nkisoko ya gaze yo kubyimba. Nyuma yo gutoragura, kwoza amazi meza mugihe cyamasaha 10, hanyuma wemeze ko ubwato bwahanaguwe neza. Nyuma yo gukora isuku, nyamuneka reba hejuru yubwato, ikarita yerekana ikarita hamwe nimpapuro zubwato hamwe, nibindi bice kugirango urebe niba hari ibisigisigi bya nitride ya silicon. Noneho wumishe ukurikije ibisabwa.

3. Gusukura ingamba

A) Kubera ko aside HF ari ibintu byangirika cyane kandi ifite ihindagurika runaka, ni bibi kubakoresha. Kubwibyo, abakora kuri poste yisuku bagomba gufata ingamba zumutekano kandi bagacungwa numuntu witanze.

B) Birasabwa gusenya ubwato no guhanagura igice cya grafite mugihe cyo gukora isuku, kugirango buri gice cyitumanaho gisukure neza. Kugeza ubu, inganda nyinshi zo murugo zikoresha isuku muri rusange, biroroshye, ariko kubera ko aside HF yangirika kubice byubutaka, isuku muri rusange izagabanya ubuzima bwa serivisi bwibice bijyanye.