Ihame rya PECVD ubwato bwa grafite ya selile yizuba (coating) | Ingufu za VET

Mbere ya byose, dukeneye kumenyaPECVD(Plasma Yongerewe Imiti Yumuyaga). Plasma ni ugukomera kwimikorere yubushyuhe bwa molekile yibintu. Kugongana hagati yabo bizatera molekile ya gaze kuba ionisiyoneri, kandi ibikoresho bizahinduka uruvange rwa ion nziza zigenda zidegembya, electron na selile zidafite aho zibogamiye zikorana.

 

Bigereranijwe ko igipimo cyo gutakaza urumuri rwumucyo hejuru ya silicon kiri hejuru ya 35%. Filime irwanya kwigaragaza irashobora kuzamura cyane igipimo cyimikoreshereze yumucyo wizuba ukoresheje selile ya batiri, ifasha kongera ubwinshi bwamafoto ya fotogene kandi bityo bikazamura imikorere ihinduka. Muri icyo gihe, hydrogène iri muri firime inyura hejuru ya selile ya batiri, igabanya igipimo cyo kongera kwiyunga hejuru y’isangano rya emitter, igabanya umuyaga wijimye, ikongerera ingufu z'umuzunguruko ufunguye, kandi igahindura imikorere y’amafoto. Ubushyuhe bwo hejuru burahita bushyira mugikorwa cyo gutwika bica imigozi imwe ya Si-H na NH, kandi H yarekuwe ikomeza gushimangira passivisiyo ya batiri.

 

Kubera ko ibikoresho bya silikoni yo mu rwego rwa Photovoltaque byanze bikunze birimo umwanda mwinshi nudusembwa, ubwikorezi bwabatwara ubuzima bwabo bwose hamwe nuburebure bwikwirakwizwa muri silicon buragabanuka, bigatuma igabanuka ryimikorere ya bateri. H irashobora kubyitwaramo inenge cyangwa umwanda muri silicon, bityo ikohereza ingufu zumurongo mugace ka valence band cyangwa umuyoboro.

 

1. Ihame rya PECVD

Sisitemu ya PECVD ni urukurikirane rwa generator ikoreshaPECVD ubwato bwa grafite hamwe na plasma nyinshi cyane. Imashini itanga plasma yashyizwe hagati yicyapa cyo gutwikira kugirango ikore munsi yumuvuduko muke nubushyuhe bwo hejuru. Imyuka ikora ikoreshwa ni silane SiH4 na ammonia NH3. Iyi myuka ikora kuri nitride ya silicon ibitswe kuri wafer ya silicon. Ibipimo bitandukanye byangiritse birashobora kuboneka muguhindura igipimo cya silane na ammonia. Mugihe cyo kubitsa, havamo umubare munini wa atome ya hydrogène na ion ya hydrogène, bigatuma hydrogène passivation ya wafer iba nziza cyane. Mu cyuho n'ubushyuhe bw’ibidukikije bwa dogere selisiyusi 480, igice cya SixNy gitwikiriwe hejuru ya wafer ya silicon ukoresheje uPECVD ubwato bwa grafite.

 

3SiH4 + 4NH3 → Si3N4 + 12H2

 

2. Si3N4

Ibara rya firime ya Si3N4 ihinduka hamwe nubunini bwayo. Mubisanzwe, uburebure bwiza buri hagati ya 75 na 80 nm, bigaragara ubururu bwijimye. Indangantego ya firime ya Si3N4 nibyiza hagati ya 2.0 na 2.5. Inzoga zisanzwe zikoreshwa mugupima indangagaciro.

Ingaruka nziza ya passivation yubuso, imikorere ya optique irwanya-kwigaragaza (igipimo cyerekana umubyimba uhuza), ubushyuhe buke (kugabanya ibiciro neza), hamwe na H ion zabyaye hejuru ya silicon wafer.

 

3. Ibibazo bisanzwe mumahugurwa yo gutwikira

Ubunini bwa firime: 

Igihe cyo kubitsa kiratandukanye kubyerekeranye na firime zitandukanye. Igihe cyo kubitsa kigomba kongerwa neza cyangwa kugabanuka ukurikije ibara ryigitambaro. Niba firime yera, igihe cyo kubitsa kigomba kugabanywa. Niba ari umutuku, bigomba kongerwa muburyo bukwiye. Buri bwato bwa firime bugomba kwemezwa byuzuye, kandi ibicuruzwa bifite inenge ntibyemewe gutembera mubikorwa bikurikira. Kurugero, niba igifuniko gikennye, nkibibara byamabara nibimenyetso byamazi, ubuso busanzwe bwera, itandukaniro ryamabara, nibibara byera kumurongo wibikorwa bigomba gutorwa mugihe. Kwera hejuru biterwa ahanini na firime nitride ya silicon yuzuye, ishobora guhindurwa muguhindura igihe cyo kohereza film; ibara ritandukanya ibara riterwa ahanini no guhagarika inzira ya gazi, gutemba kwa quartz, kunanirwa kwa microwave, nibindi.; ibibara byera ahanini biterwa nibibara bito byirabura mubikorwa byabanjirije. Gukurikirana ibyerekanwa, indangagaciro zivunika, nibindi, umutekano wa gaze zidasanzwe, nibindi.

 

Ibibara byera hejuru:

PECVD ni inzira yingirakamaro cyane mungirangingo zuba kandi nikimenyetso cyingenzi cyerekana imikorere yizuba ryikigo. Inzira ya PECVD irahuze cyane, kandi buri cyiciro cyingirabuzimafatizo zigomba gukurikiranwa. Hano hari itanura ryinshi ryo gutwika, kandi buri tube ifite selile amagana (bitewe nibikoresho). Nyuma yo guhindura ibipimo byimikorere, kugenzura kuzenguruka ni birebire. Tekinoroji ya tekinoroji ni tekinoroji inganda zose zifotora zifite akamaro kanini. Imikorere ya selile yizuba irashobora kunozwa mugutezimbere tekinoroji. Mu bihe biri imbere, ikoranabuhanga ry’izuba rishobora kuba intambwe mu mikorere y’ingirabuzimafatizo.