Umurongo wibicuruzwa bya VET ntabwo bigarukira gusa kuri wafer ya silicon. Dutanga kandi ibikoresho byinshi bya semiconductor substrate ibikoresho, harimo SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, nibindi, hamwe nibikoresho bishya bigari bya semiconductor nka Gallium Oxide Ga2O3 na AlN Wafer. Ibicuruzwa birashobora guhaza ibyifuzo byabakiriya batandukanye mumashanyarazi ya elegitoroniki, radiyo yumurongo, sensor hamwe nizindi nzego.
Imirima yo gusaba:
•Imirongo ihuriweho:Nkibikoresho byibanze byinganda zuzuzanya, wa-silicon wafers ikoreshwa cyane mumirongo itandukanye ya logique, kwibuka, nibindi.
•Ibikoresho by'ingufu:P-ubwoko bwa silicon wafers irashobora gukoreshwa mugukora ibikoresho byamashanyarazi nka tristoriste yamashanyarazi na diode.
•Sensors:Ubwoko bwa P-silicon wafers irashobora gukoreshwa mugukora ubwoko butandukanye bwa sensor, nkibikoresho byumuvuduko, ibyuma byubushyuhe, nibindi.
•Imirasire y'izuba:P-ubwoko bwa silicon wafers nigice cyingenzi cyingirabuzimafatizo zuba.
Ingufu za VET zitanga abakiriya ibisubizo byabigenewe byabigenewe, kandi birashobora guhitamo wafer ifite imbaraga zitandukanye, ibintu bitandukanye bya ogisijeni, ubunini butandukanye nibindi bisobanuro ukurikije ibyo abakiriya bakeneye. Mubyongeyeho, turatanga kandi inkunga ya tekiniki yumwuga na nyuma yo kugurisha kugirango dufashe abakiriya gukemura ibibazo bitandukanye bahura nabyo mubikorwa byo gukora.
KUBONA UMWIHARIKO
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
TTV (GBIR) | ≤6um | ≤6um | |||
Umuheto (GF3YFCD) -Agaciro keza | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Intambara (GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2 mm | ||||
Wafer Edge | Beveling |
BURUNDU
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
Kurangiza | Impande ebyiri Optical Polonye, Si- Isura CMP | ||||
Ubuso | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Isura Ra≤0.2nm | |||
Imipira | Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm) | ||||
Ibimenyetso | Nta na kimwe cyemewe | ||||
Igishushanyo (Si-Isura) | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | ||
Ibice | Nta na kimwe cyemewe | ||||
Guhezwa | 3mm |