VET Energy ya santimetero 8 ya silicon wafers ikoreshwa cyane muri electronics power, sensor, imiyoboro ihuriweho hamwe nizindi nzego. Nkumuyobozi mu nganda ziciriritse, twiyemeje gutanga ibicuruzwa byiza bya Si Wafer kugirango tubone ibyo abakiriya bacu bakeneye.
Usibye Si Wafer, Ingufu za VET zitanga kandi ibikoresho byinshi bya semiconductor substrate, harimo SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, nibindi. Wafer, itanga inkunga ikomeye mugutezimbere-ibisekuru bizaza ibikoresho bya elegitoroniki.
Ingufu za VET zifite ibikoresho byumusaruro bigezweho hamwe na sisitemu yuzuye yo gucunga neza kugirango buri wafer yujuje ubuziranenge bwinganda. Ibicuruzwa byacu ntabwo bifite ibikoresho byiza byamashanyarazi gusa, ahubwo bifite imbaraga zumukanishi hamwe nubushyuhe bwumuriro.
Ingufu za VET zitanga abakiriya ibisubizo byabigenewe byabigenewe, harimo wafer yubunini butandukanye, ubwoko hamwe na doping. Mubyongeyeho, turatanga kandi inkunga ya tekiniki yumwuga na nyuma yo kugurisha kugirango dufashe abakiriya gukemura ibibazo bitandukanye bahura nabyo mugihe cyibikorwa.
KUBONA UMWIHARIKO
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
TTV (GBIR) | ≤6um | ≤6um | |||
Umuheto (GF3YFCD) -Agaciro keza | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Intambara (GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2 mm | ||||
Wafer Edge | Beveling |
BURUNDU
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
Kurangiza | Impande ebyiri Optical Polonye, Si- Isura CMP | ||||
Ubuso | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Isura Ra≤0.2nm | |||
Imipira | Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm) | ||||
Ibimenyetso | Nta na kimwe cyemewe | ||||
Igishushanyo (Si-Isura) | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | ||
Ibice | Nta na kimwe cyemewe | ||||
Guhezwa | 3mm |