VET Ingufu SiC Yashizwehoni igisubizo cyiza cyane cyateguwe neza kugirango gitange imikorere yizewe, ihamye mugihe cyigihe kirekire, cyujuje ibyifuzo bikenerwa ninganda zikora. Kugaragaza ubushyuhe budasanzwe, uburinganire bwumuriro burenze, hamwe nubuziranenge bwinshi, iki gicuruzwa nicyiza kubatwara wafer ya MOCVD hamwe nubundi buryo bwo gutunganya wafer busaba gutuza no kumenya neza. Kurwanya isuri gukomeye bituma ihitamo neza kubidukikije aho kuramba no guhangana n’imiti ari ngombwa.
IwacuSiC Yashushanyijeho Graphite Susceptorihagaze nkigice cyingenzi mubikorwa byo gukora igice cya kabiri, ikoresha tekinoroji yihariye ya VET Energy kugirango igere ku isuku irenze urugero, uburinganire buhebuje, hamwe nubushyuhe budasanzwe bwumuriro. Igifuniko cyongera igishushanyo mbonera hamwe nubuzima bwa serivisi bwagutse cyane. Ubwitange bwa VET bwujuje ubuziranenge bwatumye suseptor ikozweho na SiC yujuje ibyifuzo bikenerwa n’isoko ryitwara rya grafite wafer, ishyiraho urwego rwo hejuru kuri sisitemu ya grafite ya sisitemu ikoreshwa muriInzira ya MOCVD.
Ibintu by'ingenzi biranga SiC bifunze Susceptors:
1. Kurwanya Ubushyuhe Bwinshi bwa Oxidation Kurwanya:Ihangane n'ubushyuhe bugera kuri 1700 ℃, bigatuma bikwiranye nuburyo bwo gutunganya bikabije.
2. Isuku ryinshi hamwe nubushuhe bwubushuhe:Iremeza ibisubizo bihamye, byingenzi kuriMOCVDhamwe nubundi buryo busobanutse.
3. Kurwanya ruswa nziza cyane:Ihangane na aside, alkali, umunyu, hamwe na reagent zitandukanye.
4. Kuzamura Ubuso bukomeye:Ubuso bwuzuye hamwe nibice byiza bitanga kuramba no kuramba.
5. Ubuzima bwagutse bwa serivisi:Yashizweho kugirango ikore neza, irenze silikoni isanzwe ya karbide-yashizwemo na susceptors ahantu habi hatunganijwe.
Nkumushinga wambere, VET Ingufu kabuhariwe muri grafite yihariye kandisilicon carbide ibicuruzwahamwe nuburyo butandukanye bwo gutwikira, harimoSiC, Igikoresho cya TaC, ibirahuri bya karuboni, hamwe na pirolitike ya karubone. Twishimiye cyane gukorera inganda za semiconductor na Photovoltaque, tugatanga silicon karbide isize grafite susceptors yujuje ibyifuzo byihariye.
Itsinda ryacu rya tekinike, hamwe nuburambe mu bigo by’ubushakashatsi byo mu gihugu byo hejuru, byiyemeje guteza imbere ibisubizo bifatika kubikenewe bikenerwa naSiC-yashushanyijeho grafite susceptorisoko. Binyuze mubikorwa byacu byemewe, VET Energy yateje imbere ikoranabuhanga ridasanzwe ritezimbere cyane imbaraga zubusabane hagati ya carbide ya silicon na substrate, bigabanya ibyago byo gutandukana no kongera igihe kirekire.
Porogaramu ninyungu mugutunganya Semiconductor
UwitekaSiC ikingira MOCVDGushobozaibishushanyo mboneraibice kugirango ubungabunge ubusugire munsi yubushyuhe bwo hejuru hamwe nibidukikije byangirika, nibyingenzi kubyara umusaruro wa semiconductor neza. Ibi bikoresho bya SiC bifatanyirijwe hamwe bihabwa agaciro cyane mubikorwa bisaba silicon karbide ikozwe na susceptors yagrafite wafer, bisaba ubushyuhe bwinshi, ubuziranenge, no kurwanya isuri yimiti.
Hamwe na tekinoroji ya silikoni ya karbide yateye imbere, ingufu za VET zikomeje gushyigikira isoko ryitwara rya grafite wafer mugutanga ibicuruzwa byihariye, bikora nezaSiC ikozweho na grafiteibyo bikemura ibibazo byihariye byinganda, kuva mubikorwa bya MOCVD kugeza murwego rwohejuru rushyirwa mubikorwa bya semiconductor.