I-Silicon Carbide Coating yePlayithi yeTreyi yeGraphite kunye ne-Cover

I-Silicon Carbide Coating yePlayiti yeTreyi yeGraphite kunye neSigqubuthelo soMfanekiso oFakelweyo

Inkcazelo emfutshane:

I-VET Energy silicon carbide yokwambathisa ipleyiti yegraphite kunye nesigqubuthelo yimveliso ephezulu yokusebenza eyilelwe ukubonelela ngokusebenza okungaguqukiyo nokuthembekileyo kwithuba elide. Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.

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Amandla e-VETI-Silicon Carbide Coating yeTreyi yeGraphite, i-Plate, kunye ne-Cover yenzelwe ukuhambisa ukusebenza kwe-top-tier, ukubonelela ngokusebenza okuthembekileyo kunye nokuhambelanayo kusetyenziso olwandisiweyo, okwenza kube lukhetho olubalulekileyo lwe-wafer processing applications kwishishini le-semiconductor. Lo msebenzi ophezuluI-Silicon Carbide Coating yePlayithi yeGraphiteinokumelana nobushushu obukhethekileyo, ukufana okuphezulu kwe-thermal, kunye nozinzo lwekhemikhali olubalaseleyo, ngakumbi kwiimeko zobushushu obuphezulu. Ulwakhiwo lwayo olucocekile oluphezulu, oludityaniswa nokumelana nokhukuliseko oluphambili, luyenza ibaluleke kakhulu kwiindawo ezifunwayo ezifanaI-MOCVD susceptors.

Iimpawu eziphambili zeSilicon Carbide Coating Graphite Tray, iPlate, kunye ne-Cover

1. Ukumelana ne-Oxidation yobushushu obuphezulu:Imelana namaqondo obushushu ukuya kwi-1700℃, iyenza ikwazi ukusebenza ngokuthembekileyo kwiimeko ezinzima.

2. Ukucoceka okuphezulu kunye nokuFaniswa kweThermal:Ukucoceka okuphezulu okuhambelanayo kunye nokusabalalisa ubushushu kubalulekile kwizicelo ze-MOCVD.

3. UKuxhathisa kuMhlwa:Ukumelana ne-acids, i-alkalis, iityuwa, kunye nee-reagents ezahlukeneyo zezinto eziphilayo, ukuqinisekisa ukuzinza kwexesha elide kwiindawo ezahlukeneyo.

4. Ubulukhuni obuPhezulu kunye noMphezulu oQhelekileyo:Iquka indawo exineneyo kunye neengqungquthela ezintle, ukuphucula ukuqina okupheleleyo kunye nokuchasana nokunxiba.

5. Ubomi Benkonzo Eyandisiweyo:Yenzelwe ubomi obude, isebenze ngaphezulu kwesiqheloi-silicon carbide-coated graphite susceptorskwiindawo ezirhabaxa zokusetyenzwa kwe-semiconductor.

CVD SiC薄膜基本物理性能 Iimpawu ezisisiseko ze-CVD SiCukutyabeka
性质 / Ipropati	典型数值 / Ixabiso eliqhelekileyo
晶体结构 / Ulwakhiwo lweCrystal	iFCC β isigaba多晶，主要為（111）取向
密度 / Ubuninzi	3.21 g/cm³
硬度 / Ukuqina	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Iinkozo uSiZe	2 ~ 10μm
纯度 / Ukucoceka kwemichiza	99.99995%
热容 / Umthamo wobushushu	640 J·kg^-1·K^-1
升华温度 / Iqondo lobushushu elisezantsi	2700℃
抗弯强度 / Amandla e-Flexural	415 MPa RT 4-point
杨氏模量 / Imodyuli yabaselula	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalUkuqhuba	300Wm^-1·K^-1
热膨胀系数 / Ukwandiswa kweThermal(CTE)	4.5×10^-6K^-1

Ubuchwephesha be-VET yaMandla kwiGraphite eLungisiweyo kunye neSilicon Carbide Solutions

Njengomvelisi othembekileyo, i-VET Energy igxile kwii-susceptors ezenzelwe igraphite kunye nezisombululo zokugquma kwe-silicon carbide. Sinikezela ngoluhlu lweemveliso ezilungiselelwe i-semiconductor kunye ne-photovoltaic industries, kuqukaAmacandelo egraphite afakwe kwi-SiCnjengeetreyi, iipleyiti, kunye namaqweqwe. Uluhlu lwethu lwemveliso lukwabandakanya iindlela ezahlukeneyo zokugquma, ezifanaSiC ukutyabeka for MOCVD, TaC ukutyabeka, iglasi ikhabhoni ukutyabeka, kunye ne-pyrolytic carbon coating, siqinisekisa ukuba sihlangabezana neemfuno ezahlukeneyo zamashishini aphezulu.

Iqela lethu lobugcisa elinamava, eliquka iingcali ezivela kumaziko aphezulu ophando lwasekhaya, libonelela ngezisombululo zezinto eziphathekayo kubathengi. Sisoloko sicokisa iinkqubo zethu eziphucukileyo, kuquka iteknoloji ekhethekileyo enelungelo elilodwa lomenzi wechiza ophucula iqhina phakathi kwesilicon carbide coating kunye negraphite substrate, sinciphisa umngcipheko wokuvalelwa kunye nokwandisa ubomi bemveliso.

Izicelo kunye neNzuzo kwiSemiconductor Manufacturing

II-Silicon Carbide Coating ye-MOCVDyenza ezi susceptors zegraphite zisebenze kakhulu kwindawo yobushushu obuphezulu, kwindawo ezonakalisayo. Nokuba isetyenziswa njengabathwali be-graphite wafer okanye amanye amacandelo e-MOCVD, ezi susceptors ezigqunywe ngesilicon carbide zibonisa ukuqina nokusebenza okuphezulu. Kwabo bafuna izisombululo ezithembekileyo kwiI-SiC-coated graphite susceptorimakethi, i-VET Energy yesilicon carbide-coated graphite tray, ipleyiti, kunye nekhava zibonelela ngokhetho olomeleleyo noluguquguqukayo oluhlangabezana neemfuno eziqatha kushishino lwesemiconductor.

Ngokugxininisa kwisayensi yezinto eziphambili, i-VET Energy izimisele ukuhambisa izisombululo eziphezulu ze-SiC-coated graphite eziqhuba i-innovation kwi-semiconductor processing kunye nokuqinisekisa ukusebenza okuthembekileyo kuzo zonke izicelo ezinxulumene ne-MOCVD.

I-VET Amandla ngumvelisi wokwenyani weemveliso zegraphite kunye ne-silicon carbide ezineengubo ezahlukeneyo ezifana nokwaleka kwe-SiC, i-TaC yokwambathisa, i-glassy carbon coating, i-pyrolytic carbon coating, njl., inokubonelela ngeendawo ezahlukeneyo ezilungiselelwe i-semiconductor kunye ne-photovoltaic industry.

Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

Sisoloko siphuhlisa iinkqubo eziphambili zokubonelela ngemathiriyeli ephucukileyo, kwaye sisebenze itekhnoloji eyodwa enelungelo elilodwa lomenzi wechiza, enokwenza iqhina phakathi kwengubo kunye ne-substrate ibe ngqongqo kwaye ingabikho lula ekuthinteleni.

Wamkelekile ngokufudumeleyo ukuba undwendwele umzi-mveliso wethu, makhe sibenengxoxo eyongezelelekileyo!