I-SiC Coating yeGraphite MOCVD Wafer Carriers Susceptors

SiC Coating Graphite MOCVD Wafer Abathwali Susceptors Featured Umfanekiso

Inkcazelo emfutshane:

I-VET Energy SiC Coated MOCVD Susceptor ye-Epitaxial Growth yimveliso ephezulu yokusebenza eyenzelwe ukubonelela ngokuqhubekayo kunye nokusebenza okuthembekileyo kwixesha elide. Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.

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SiC ukutyabeka igraphite MOCVD Wafer abathwali / susceptor

Zonke i-susceptors zethu zenziwe nge-graphite ye-isostatic ephezulu. Ukuxhamla kubunyulu obuphezulu beegrafu zethu - eziphuhliswe ngokukodwa kwiinkqubo ezicela umngeni ezifana ne-epitaxy, ukukhula kwekristale, ukufakwa kwe-ion kunye ne-plasma etching, kunye nokuveliswa kweetshiphusi ze-LED.

Iimpawu zeemveliso zethu:

1. Ukumelana nobushushu obuphezulu be-oxidation ukuya kuthi ga kwi-1700℃.
2. Ukucoceka okuphezulu kunye nokufana kwe-thermal
3. Ukumelana nokugqwesa okugqwesileyo: i-asidi, i-alkali, ityuwa kunye ne-organic reagents.
4. Ubunzima obuphezulu, indawo edibeneyo, iincinci ezincinci.
5. Ubomi benkonzo ende kwaye buhlala ixesha elide

CVD SiC薄膜基本物理性能 Iimpawu ezisisiseko ze-CVD SiCukutyabeka
性质 / Ipropati	典型数值 / Ixabiso eliqhelekileyo
晶体结构 / Ulwakhiwo lweCrystal	FCC isigaba β多晶，主要為（111）取向
密度 / Ubuninzi	3.21 g/cm³
硬度 / Ukuqina	2500 维氏硬度 (500g umthwalo)
晶粒大小 / Ukhozo SiZe	2 ~ 10μm
纯度 / Ukucoceka kwemichiza	99.99995%
热容 / Umthamo wobushushu	640 J·kg^-1·K^-1
升华温度 / Iqondo lobushushu elisezantsi	2700℃
抗弯强度 / Amandla e-Flexural	415 MPa RT 4-inqaku
杨氏模量 / Imodyuli yabaselula	430 Gpa 4pt bend, 1300℃
导热系数 / ThermalUkuqhuba	300Wm^-1·K^-1
热膨胀系数 / Ukwandiswa kweThermal(CTE)	4.5×10^-6K^-1

I-VET Amandla ngumvelisi wokwenyani weemveliso zegraphite kunye ne-silicon carbide ezineengubo ezahlukeneyo ezifana nokwaleka kwe-SiC, i-TaC yokwambathisa, i-glassy carbon coating, i-pyrolytic carbon coating, njl., inokubonelela ngeendawo ezahlukeneyo ezilungiselelwe i-semiconductor kunye ne-photovoltaic industry.

Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

Sisoloko siphuhlisa iinkqubo eziphambili zokubonelela ngemathiriyeli ephucukileyo, kwaye sisebenze itekhnoloji eyodwa enelungelo elilodwa lomenzi wechiza, enokwenza iqhina phakathi kwengubo kunye ne-substrate ibe ngqongqo kwaye ingabikho lula ekuthinteleni.

Wamkelekile ngokufudumeleyo ukuba undwendwele umzi-mveliso wethu, makhe sibenengxoxo eyongezelelekileyo!