Ukucoca isikhephe segraphite sePECVD?| Amandla e-VET

1. Ukuvuma ngaphambi kokucoca

1) Xa iPECVD isikhephe segraphite/ i-carrier isetyenziswe ngaphezu kwe-100 kumaxesha e-150, umqhubi kufuneka ahlolisise imeko yokugqoka ngexesha. Ukuba kukho isambatho esingaqhelekanga, kufuneka sicocwe kwaye siqinisekiswe. Umbala oqhelekileyo wokugquma we-silicon wafer kwi-graphite boat/carrier ubhlowu. Ukuba i-wafer ine-non-blue, imibala emininzi, okanye umehluko wombala phakathi kwee-wafers mkhulu, i-coating engaqhelekanga, kwaye unobangela wokungaqhelekanga kufuneka uqinisekiswe ngexesha.
2) Emva kokuba abasebenzi benkqubo bahlalutye imeko yokwalekaPECVD isikhephe segraphite/ umthwali, baya kugqiba ukuba ngaba isikhephe segraphite sifuna ukucocwa kunye nokuba inqaku lekhadi lifuna ukutshintshwa, kunye ne-graphite boat / carrier efuna ukucocwa iya kunikezelwa kubasebenzi bezixhobo zokucoca.

 

3) Emva kokoisikhephe segraphite/ umthwali wonakele, abasebenzi bemveliso baya kukhupha zonke iziqwenga ze-silicon kwisikhephe segraphite kwaye basebenzise i-CDA (umoya ocinezelweyo) ukulungisa amaqhekeza kwiisikhephe segraphite. Emva kokugqitywa, abasebenzi bezixhobo baya kuyiphakamisa kwitanki ye-asidi elungiselelwe kunye nenxalenye ethile yesisombululo se-HF sokucoca.

 

2. Ukucoca isikhephe segraphite

Kucetyiswa ukuba kusetyenziswe isisombululo se-15-25% se-hydrofluoric acid kwimijikelo emithathu yokucoca, nganye kwiiyure ezingama-4-5, kunye ne-nitrogen ngamaxesha athile ngexesha lokucwina kunye nokucoca, ukongeza malunga nesiqingatha seyure yokucoca; Qaphela: akukhuthazwa ukuba kusetyenziswe umoya ngokuthe ngqo njengomthombo werhasi yokubhobhoza. Emva kokukhetha, hlambulula ngamanzi acocekileyo malunga neeyure ze-10, kwaye uqinisekise ukuba isikhephe sihlambuluke kakuhle. Emva kokucoca, nceda ujonge umphezulu wesikhephe, inqaku lekhadi legraphite kunye ne-joint sheet sheet, kunye nezinye iindawo ukuze ubone ukuba kukho nayiphi na intsalela ye-silicon nitride. Emva koko womile ngokweemfuno.

3. Ukucoca amanyathelo

A) Ekubeni i-asidi ye-HF iyinto eyingozi kakhulu kwaye inokuguquguquka okuthile, iyingozi kubaqhubi. Ngoko ke, abasebenzi kwisithuba sokucoca kufuneka bathathe amanyathelo okhuseleko kwaye balawulwe ngumntu ozinikeleyo.

B) Kunconywa ukuba udibanise isikhephe kwaye uhlambulule kuphela inxalenye yegraphite ngexesha lokucoca, ukwenzela ukuba inxalenye nganye yoqhagamshelwano inokucocwa ngakumbi. Okwangoku, abaninzi abavelisi basekhaya basebenzisa ukucoca ngokubanzi, okufanelekileyo, kodwa ngenxa yokuba i-asidi ye-HF igqwala kwiindawo ze-ceramic, ukucoca ngokubanzi kuya kunciphisa ubomi benkonzo yamacandelo ahambelanayo.