6 Inch N Type SiC Wafer

Tsanangudzo Pfupi:

Iyo 6 Inch N Type SiC Wafer kubva kuVET Energy ndeyepamusoro-inoshanda substrate yakagadzirirwa advanced semiconductor application, inopa yepamusoro yekupisa conductivity uye kugona kwesimba. VET Energy inoshandisa tekinoroji yekucheka-kumucheto kugadzira mawaferi emhando yepamusoro anosangana nezvinodiwa zvemagetsi emazuva ano, kuve nechokwadi chekuvimbika uye kusimba mumidziyo yemagetsi.

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Iyi 6 Inch N Type SiC Wafer yakagadzirirwa kukwidziridzwa kuita mumamiriro akanyanya, zvichiita kuti ive sarudzo yakanaka kune maapplication anoda simba repamusoro uye tembiricha kuramba. Zvigadzirwa zvakakosha zvine chekuita neiyi wafer zvinosanganisira Si Wafer, SiC Substrate, SOI Wafer, uye SiN Substrate. Zvishandiso izvi zvinogonesa kuita kwakaringana mumhando dzakasiyana dzekugadzira semiconductor, zvichigonesa zvishandiso zviri zvese zvine simba uye zvinogara.

Kumakambani anoshanda neEpi Wafer, Gallium Oxide Ga2O3, Cassette, kana AlN Wafer, VET Energy's 6 Inch N Type SiC Wafer inopa hwaro hunodiwa hwekuvandudza chigadzirwa. Kunyangwe iri mumagetsi emagetsi epamusoro-soro kana ichangoburwa muRF tekinoroji, mawaferi aya anovimbisa kufambisa kwakanaka uye kushomeka kwekupisa kwemafuta, kusunda miganhu yekubudirira uye kuita.

WAFERING SECIFICATIONS

*n-Pm=n-type Pm-Giredhi,n-Ps=n-type Ps-Giredhi,Sl=Semi-lnsulating

Item	8-Inji	6-Inch			4-inch
Item	nP	n-Pm	n-Mapisarema	SI	SI
TTV(GBIR)	≤6um	≤6um
Bow(GF3YFCD)-Absolute Value	≤15μm	≤15μm	≤25μm		≤15μm
Warp(GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV(SBIR) -10mmx10mm	<2μm
Wafer Edge	Beveling

SURFACE FINISH

*n-Pm=n-type Pm-Giredhi,n-Ps=n-type Ps-Giredhi,Sl=Semi-lnsulating

Item	8-Inch	6-Inch			4-inch
	nP	n-Pm	n-Mapisarema	SI	SI
Surface Finish	Kaviri divi Optical Polish, Si- Face CMP
SurfaceRoughness	(10um x 10um) Si-FaceRa≤0.2nm C-Face Ra≤ 0.5nm			(5umx5um) Si-Face Ra≤0.2nm C-Face Ra≤0.5nm
Edge Chips	Hapana Inobvumidzwa (kureba nehupamhi≥0.5mm)
Indents	Hapana Inobvumirwa
Makwara (Si-Face)	Uk.≤5,Kuwedzera Kureba≤0.5×wafer dhayamita	Uk.≤5,Kuwedzera Kureba≤0.5×wafer dhayamita			Uk.≤5,Kuwedzera Kureba≤0.5×wafer dhayamita
Mitswe	Hapana Inobvumirwa
Kusabatanidzwa kumucheto	3mm