VET Energy's 8-inch silicon wafers anoshandiswa zvakanyanya mumagetsi emagetsi, masensa, maseketi akasanganiswa uye mamwe minda. Semutungamiri muindasitiri yesemiconductor, takazvipira kupa zvemhando yepamusoro Si Wafer zvigadzirwa kuti zvizadzise zvinodiwa nevatengi vedu.
Pamusoro peSi Wafer, VET Energy inopawo zvakasiyana-siyana zve semiconductor substrate zvinhu, zvinosanganisira SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, nezvimwewo. Wafer, ichipa rutsigiro rwakasimba rwekuvandudzwa kwechizvarwa chinotevera magetsi emagetsi emagetsi.
VET Energy ine michina yekugadzira yepamusoro uye yakakwana yemhando yekutonga system kuti ive nechokwadi chekuti wafer yega yega inosangana neyakaomesesa indasitiri zviyero. Zvigadzirwa zvedu hazvina kungoita zvemagetsi zvakanakisa, asiwo zvine simba rakanaka remagetsi uye kugadzikana kwekupisa.
VET Energy inopa vatengi zvigadziriso zvewafer zvakagadziridzwa, zvinosanganisira mawafer ehukuru hwakasiyana, mhando uye doping concentration. Uye zvakare, isu tinopawo nyanzvi yehunyanzvi rutsigiro uye mushure mekutengesa sevhisi kubatsira vatengi kugadzirisa matambudziko akasiyana akasangana panguva yekugadzira.
WAFERING SECIFICATIONS
*n-Pm=n-type Pm-Giredhi,n-Ps=n-type Ps-Giredhi,Sl=Semi-lnsulating
Item | 8-Inji | 6-Inji | 4-inch | ||
nP | n-Pm | n-Mapisarema | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Bow(GF3YFCD)-Absolute Value | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR) -10mmx10mm | <2μm | ||||
Wafer Edge | Beveling |
SURFACE FINISH
*n-Pm=n-type Pm-Giredhi,n-Ps=n-type Ps-Giredhi,Sl=Semi-lnsulating
Item | 8-Inji | 6-Inji | 4-inch | ||
nP | n-Pm | n-Mapisarema | SI | SI | |
Surface Finish | Kaviri divi Optical Polish, Si- Face CMP | ||||
SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Edge Chips | Hapana Inobvumidzwa (kureba nehupamhi≥0.5mm) | ||||
Indents | Hapana Inobvumirwa | ||||
Makwara (Si-Face) | Uk.≤5,Kuwedzera | Uk.≤5,Kuwedzera | Uk.≤5,Kuwedzera | ||
Mitswe | Hapana Inobvumirwa | ||||
Kusabatanidzwa kumucheto | 3mm |