4 Inch GaN paSiC Wafer

Tsanangudzo Pfupi

VET Energy's 4-inch GaN paSiC wafer ishanduko chigadzirwa mumunda wemagetsi emagetsi. Wafer iyi inosanganisa yakanakisa yekupisa yekupisa kwesilicon carbide (SiC) ine yakanyanya simba density uye yakaderera kurasikirwa kwegallium nitride (GaN), zvichiita kuti ive sarudzo yakanaka yekugadzira yakakwirira-frequency, yepamusoro-simba zvishandiso. VET Energy inovimbisa kuita kwakanakisa uye kuenderana kweiyo wafer kuburikidza neyepamberi MOCVD epitaxial tekinoroji.

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Mutsetse wechigadzirwa cheVET Energy haungogumiri kuGaN paSiC wafers. Isu tinopawo zvakasiyana-siyana zve semiconductor substrate zvinhu, zvinosanganisira Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, nezvimwewo. Pamusoro pezvo, tiri kushingairira kugadzira zvitsva zvakafara bandgap semiconductor zvinhu, zvakaita seGallium Oxide Ga2O3 neAlN. Wafer, kusangana neramangwana remagetsi emagetsi indasitiri yekuda kwepamusoro mashandiro emidziyo.

VET Energy inopa masevhisi anochinjika, uye inokwanisa kugadzirisa GaN epitaxial akaturikidzana ehukobvu hwakasiyana, marudzi akasiyana edoping, uye masaizi akasiyana ewafer zvinoenderana nezvinodiwa nevatengi. Uye zvakare, isu tinopawo nyanzvi yehunyanzvi rutsigiro uye mushure mekutengesa-sevhisi kubatsira vatengi kukurumidza kugadzira yakakwirira-inoshanda magetsi emagetsi zvigadzirwa.

WAFERING SECIFICATIONS

*n-Pm=n-type Pm-Giredhi,n-Ps=n-type Ps-Giredhi,Sl=Semi-lnsulating

Item	8-Inch	6-Inji			4-inch
Item	nP	n-Pm	n-Mapisarema	SI	SI
TTV(GBIR)	≤6um	≤6um
Bow(GF3YFCD)-Absolute Value	≤15μm	≤15μm	≤25μm		≤15μm
Warp(GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV(SBIR) -10mmx10mm	<2μm
Wafer Edge	Beveling

SURFACE FINISH

*n-Pm=n-type Pm-Giredhi,n-Ps=n-type Ps-Giredhi,Sl=Semi-lnsulating

Item	8-Inch	6-Inji			4-inch
	nP	n-Pm	n-Mapisarema	SI	SI
Surface Finish	Kaviri divi Optical Polish, Si- Face CMP
SurfaceRoughness	(10um x 10um) Si-FaceRa≤0.2nm C-Face Ra≤ 0.5nm			(5umx5um) Si-Face Ra≤0.2nm C-Face Ra≤0.5nm
Edge Chips	Hapana Inobvumidzwa (kureba nehupamhi≥0.5mm)
Indents	Hapana Inobvumirwa
Makwara (Si-Face)	Uk.≤5,Kuwedzera Kureba≤0.5×wafer dhayamita	Uk.≤5,Kuwedzera Kureba≤0.5×wafer dhayamita			Uk.≤5,Kuwedzera Kureba≤0.5×wafer dhayamita
Mitswe	Hapana Inobvumirwa
Kusabatanidzwa kumucheto	3mm