Recrystallized Silicon Carbide Wafer Boat Ine CVD Coating

Tsanangudzo Pfupi:

VET Energy Recrystallized Silicon Carbide Wafer Boat ndeyepamusoro-inoshanda chigadzirwa chakagadzirirwa kupa kunoenderana uye kwakavimbika kuita kwekufamba kwenguva. Iyo ine yakanyanya kunaka kupisa kupisa uye kufananidzwa kwekupisa, kuchena kwepamusoro, kusamira kwevhu, zvichiita kuti ive mhinduro yakakwana yewafer processing application.


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Zvivakwa zverecrystallized silicon carbide

Recrystallized silicon carbide (R-SiC) ndeyepamusoro-inoshanda zvinhu nekuoma kwechipiri kune diamond chete, iyo inoumbwa pakupisa kwakanyanya pamusoro pe2000 ℃. Iyo inochengeta akawanda akanakisa zvimiro zveSiC, senge tembiricha yakakwira simba, yakasimba corrosion resistance, yakanakisa oxidation kuramba, yakanaka thermal shock resistance uye zvichingodaro.

● Yakanakisa michina zvinhu. Recrystallized silicon carbide ine simba repamusoro uye kuomarara kupfuura kabhoni fiber, yakanyanya kupikisa kuramba, inogona kutamba kuita kwakanaka munzvimbo dzakanyanyisa tembiricha, inogona kutamba zvirinani kuenzanisa kuita mumamiriro akasiyana siyana. Mukuwedzera, inewo kushanduka kwakanaka uye haisi nyore kukuvadzwa nekutambanudza uye kupfugama, iyo inovandudza zvikuru kushanda kwayo.

● High corrosion resistance. Recrystallized silicon carbide ine high corrosion resistance kune zvakasiyana-siyana zvezvinobudisa nhau, zvinogona kudzivirira kuparara kwemarudzi akasiyana-siyana emagetsi, inogona kuchengetedza maitiro ayo emagetsi kwenguva yakareba, ine kunamatira kwakasimba, kuitira kuti ive nehupenyu hurefu hwebasa. Mukuwedzera, iyo inewo yakanaka kugadzikana kwekushisa, inogona kuenderana kune imwe siyana yekuchinja kwekushisa, kuvandudza kushanda kwayo kwekushanda.

● Sintering haidzike. Nekuti iyo sintering process haidzike, hapana kusara kunetseka kunokonzeresa deformation kana kuputika kwechigadzirwa, uye zvikamu zvine maumbirwo akaomarara uye yakanyanya kurongeka inogona kugadzirwa.

IMG_9497
IMG_9503

重结晶碳化硅物理特性

Zvenyama zvimiro zveRecrystallized Silicon Carbide

性质 / Property

典型数值 / Typical Value

使用温度/ Tembiricha yekushanda (°C)

1600°C (neokisijeni), 1700°C (inoderedza nharaunda)

SiC含量/ SiC zvemukati

> 99.96%

自由Si含量/ Yemahara Si zvemukati

<0.1%

体积密度/Bulk density

2.60-2.70 g/cm3

气孔率/ Inooneka porosity

<16%

抗压强度/ Kudzvinyirira simba

> 600MPa

常温抗弯强度/Kutonhora kukotama simba

80-90 MPa (20°C)

高温抗弯强度Simba rekukotama rinopisa

90-100 MPa (1400°C)

热膨胀系数/ Kuwedzera kupisa @1500°C

4.70 10-6/°C

导热系数/Thermal conductivity @1200°C

23W/m•K

杨氏模量/ Elastic modulus

240 GPA

抗热震性/ Thermal shock resistance

Kunyanya kunaka

VET Energy ndizvo themugadziri chaiye weakagadziridzwa graphite uye silicon carbide zvigadzirwa neCVD coating,anogona kupazvakasiyana-siyanazvakagadzirirwa zvikamu zve semiconductor uye photovoltaic indasitiri. Our tekinoroji timu inobva kumatunhu epamusoro ekutsvagisa dzimba, inogona kupa mamwe hunyanzvi zvinhu mhindurozvako.

Isu tinoramba tichigadzira advanced process kuti tipe zvimwe zvepamberi zvinhu,uyevakagadzira yakasarudzika tekinoroji ine patent, iyo inogona kuita kuti chisungo pakati pekupotera neiyo substrate ive yakasimba uye isinganyanye kubatwa.

CVD SiC薄膜基本物理性能

Basic zvemuviri zvimiro zveCVD SiCcoating

性质 / Property

典型数值 / Typical Value

晶体结构 / Crystal Mamiriro

FCC β chikamu多晶,主要為(111)取向

密度 / Density

3.21 g/cm³

硬度 / Kuoma

2500 维氏硬度 (500g mutoro)

晶粒大小 / Zviyo SiZe

2~10μm

纯度 / Kemikari Kuchena

99.99995%

热容 / Kupisa Kugona

640 J·kg-1·K-1

升华温度 / Sublimation Temperature

2700 ℃

抗弯强度 / Flexural Simba

415 MPa RT 4-poindi

杨氏模量 / Young's Modulus

430 Gpa 4pt bend, 1300 ℃

导热系数 / ThermalConductivity

300Wm-1·K-1

热膨胀系数 / Kuwedzera Kupisa (CTE)

4.5 × 10-6K-1

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