Barrel Susceptor Kubintu byamazi Epitaxy LPE

Barrel susceptor kumazi yicyiciro epitaxy LPE

EPI (Epitaxy)ni inzira ikomeye mugukora ama semiconductor yateye imbere. Harimo gushira ibice bito byibikoresho kuri substrate kugirango habeho ibikoresho bigoye. SiC isize grafite barrel susceptor ya EPI ikunze gukoreshwa nka suseptors mumashanyarazi ya EPI bitewe nubushyuhe bwiza bwumuriro no kurwanya ubushyuhe bwinshi. Hamwe naCVD-SiC, irwanya cyane kwanduza, isuri, no guhungabana. Ibi bivamo igihe kirekire kuri susceptor no kuzamura ireme rya firime.

Ibyiza bya barrel susceptor ya feri ya epitaxy ya LPE:
Kugabanya kwanduza:Imiterere ya inert ya SiC irinda umwanda kwizirika hejuru ya susceptor, bikagabanya ibyago byo kwanduza firime zabitswe.
Kwiyongera Kurwanya Isuri:SiC irwanya cyane isuri kuruta grafite isanzwe, biganisha kumara igihe kirekire kuri susceptor.
Kunoza ubushyuhe bwumuriro:SiC ifite ubushyuhe bwiza cyane kandi irashobora kwihanganira ubushyuhe bwinshi butagoretse cyane.
Kuzamura Ubwiza bwa Filime:Kunoza ubushyuhe bwumuriro no kugabanya kwanduza bivamo amafirime meza yo kubitsa hamwe no kunoza uburinganire no kugenzura.