Epitaxial Epi Graphite Barrel Susceptor
Epitaxial Epi Graphite Barrel Susceptorni igikoresho cyabugenewe cyihariye cyo gushyushya no gushyushya gikoreshwa mu gufata no gushyushya insimburangingo ya semiconductor mugihe cyo gukora nka Deposition cyangwa Epitaxy.
Imiterere yarwo ikubiyemo ubusanzwe silindrike cyangwa isa na barrale nkeya, hejuru igaragaramo imifuka myinshi cyangwa urubuga rwo gushyira wafer, birashobora kuba bishushanyije cyangwa bidafite ishingiro, bitewe nuburyo bwo gushyushya.
Ibikorwa byingenzi bya epitaxial barrel susceptor:
-Gushigikira inkunga: ifite umutekano waferi nyinshi ya semiconductor;
-Ubushyuhe bukomoka: butanga ubushyuhe bwo hejuru busabwa kugirango ukure binyuze mu gushyushya;
-Uburinganire bwubushyuhe: butanga ubushyuhe bumwe bwa substrate;
-Rotation: mubisanzwe bizunguruka mugihe cyo gukura kugirango ubushyuhe bugabanuke hamwe no gukwirakwiza gaze.
Ihame ryakazi rya Epi graphite barrel susceptor:
- Muri reaction ya epitaxial, susceptor ya barriel yashyutswe kubushyuhe bukenewe (mubisanzwe 1000 ℃ -1200 ℃ kuri epitaxy ya silicon);
-Susceptor ya barrel irazunguruka kugirango igabanye ubushyuhe bumwe hamwe na gazi itemba;
-Imyuka yimyuka ibora kubushyuhe bwinshi, ikora epitaxial layer hejuru yubutaka.
Porogaramu:
-Bisanzwe bikoreshwa mugukura kwa silicon epitaxial
-Ikindi gisabwa kuri epitaxy yibindi bikoresho bya semiconductor nka GaAs, InP, nibindi
VET Ingufu zikoresha grafite isukuye cyane hamwe na CVD-SiC kugirango yongere imiti ihamye:
Ibyiza bya VET Ingufu Epitaxial Epi Graphite Barrel Susceptor:
-Ubushyuhe bukabije;
-Uburinganire bwiza bwumuriro;
-Ushobora gutunganya substrate nyinshi icyarimwe, kuzamura umusaruro;
-Ubushakashatsi bwimbitse, kubungabunga ibidukikije bikura neza.
Ningbo VET Energy Technology Co., Ltd ni uruganda rukora ubuhanga buhanitse rwibanda ku gukora no kugurisha ibikoresho byo mu rwego rwo hejuru, ibikoresho n’ikoranabuhanga birimo grafite, karubide ya silikoni, ububumbyi, kuvura hejuru nka SiC coating, TaC coating, karuboni yikirahure gutwikira, gutwika pyrolytike ya karubone, nibindi, ibyo bicuruzwa bikoreshwa cyane mumafoto yerekana amashanyarazi, semiconductor, ingufu nshya, metallurgie, nibindi ..
Itsinda ryacu rya tekinike rituruka mubigo byubushakashatsi bwo murugo, kandi byateje imbere tekinoroji nyinshi zemewe kugirango ibicuruzwa bikorwe neza kandi byiza, birashobora kandi guha abakiriya ibisubizo byumwuga.
Turakwishimiye cyane gusura laboratoire yacu no gutera uruganda kugirango tuganire kuri tekiniki n'ubufatanye!
