6 Inch N Ubwoko bwa SiC Wafer

Ibisobanuro bigufi:

Ubwoko 6 bwa Inch N Ubwoko bwa SiC Wafer kuva muri VET Ingufu nigikorwa cyo hejuru cyane cyateguwe kubikoresho bigezweho bya semiconductor, bitanga amashanyarazi meza kandi meza. Ingufu za VET zikoresha ikoranabuhanga rigezweho kugirango habeho waferi yujuje ubuziranenge yujuje ibyifuzo bya elegitoroniki igezweho, itanga ubwizerwe kandi burambye mubikoresho byamashanyarazi.

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Ibicuruzwa birambuye

Ibicuruzwa

Iyi 6 Inch N Ubwoko bwa SiC Wafer yakozwe muburyo bwo kongera imikorere mubihe bikabije, bigatuma ihitamo neza kubisabwa bisaba imbaraga nyinshi nubushyuhe bukabije. Ibicuruzwa byingenzi bifitanye isano niyi wafer harimo Si Wafer, SiC Substrate, SOI Wafer, na SiN Substrate. Ibi bikoresho byemeza imikorere myiza muburyo butandukanye bwo gukora semiconductor, itanga ibikoresho byombi bikoresha ingufu kandi biramba.

Ku masosiyete akorana na Epi Wafer, Gallium Oxide Ga2O3, Cassette, cyangwa AlN Wafer, VET Energy's 6 Inch N Type SiC Wafer itanga umusingi ukenewe mugutezimbere ibicuruzwa bishya. Haba muri elegitoroniki ifite ingufu nyinshi cyangwa ibigezweho mu ikoranabuhanga rya RF, iyi wafer itanga uburyo bwiza bwo gutwara neza no kurwanya ubushyuhe buke, bigatuma imipaka ikora neza.

KUBONA UMWIHARIKO

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo	8-Inch	6-Inch			4-Inch
Ingingo	nP	n-Pm	n-Zab	SI	SI
TTV (GBIR)	≤6um	≤6um
Umuheto (GF3YFCD) -Agaciro keza	≤15μm	≤15μm	≤25μm		≤15μm
Intambara (GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV (SBIR) -10mmx10mm	<2 mm
Wafer Edge	Beveling

BURUNDU

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo	8-Inch	6-Inch			4-Inch
	nP	n-Pm	n-Zab	SI	SI
Kurangiza	Impande ebyiri Optical Polonye, Si- Isura CMP
Ubuso	(10um x 10um) Si-FaceRa≤0.2nm C-Isura Ra≤ 0.5nm			(5umx5um) Si-Isura Ra≤0.2nm C-Isura Ra≤0.5nm
Imipira	Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm)
Ibimenyetso	Nta na kimwe cyemewe
Igishushanyo (Si-Isura)	Qty.≤5, Guhuriza hamwe Uburebure≤0.5 × diameter ya wafer	Qty.≤5, Guhuriza hamwe Uburebure≤0.5 × diameter ya wafer			Qty.≤5, Guhuriza hamwe Uburebure≤0.5 × diameter ya wafer
Ibice	Nta na kimwe cyemewe
Guhezwa	3mm