vet-china amaonetsetsa kuti chilichonse ChokhazikikaSilicon Carbide Wafer Handling Paddleali ndi magwiridwe antchito komanso olimba. Pansi iyi ya silicon carbide wafer imagwiritsa ntchito njira zopangira zapamwamba kuti zitsimikizire kuti kukhazikika kwake komanso magwiridwe antchito ake kumakhalabe pamalo otentha komanso ochita dzimbiri. Kapangidwe katsopano kameneka kamapereka chithandizo chabwino kwambiri pakugwira ntchito kwa ma semiconductor wafer, makamaka pamachitidwe olondola kwambiri odzipangira okha.
SiC Cantilever Paddlendi chigawo chapadera chomwe chimagwiritsidwa ntchito pazida zopangira semiconductor monga ng'anjo ya oxidation, ng'anjo yofalikira, ndi ng'anjo yowotchera, ntchito yayikulu ndikutsitsa ndikutsitsa zowotcha, zimathandizira ndi kunyamula zopatulira panthawi yotentha kwambiri.
Zomangamanga wambazaSiCcantileverpkuwonjezera: kapangidwe ka cantilever, kokhazikika kumapeto kwina ndi kopanda malire kwina, nthawi zambiri kumakhala ndi mawonekedwe athyathyathya komanso ngati paddle.
Kugwira ntchitoprinciplezaSiCcantileverpkuwonjezera:
Chombo cha cantilever chimatha kusuntha mmwamba ndi pansi kapena mmbuyo ndi mtsogolo mkati mwa chipinda cha ng'anjo, chitha kugwiritsidwa ntchito kusuntha zowotchera kuchokera kumalo onyamula kupita kumalo opangirako, kapena kunja kwa malo opangira, kuthandizira ndi kukhazikika zowotchera panthawi yotentha kwambiri.
| Zakuthupi za Recrystallized Silicon Carbide | |
| Katundu | Mtengo Wodziwika |
| Kutentha kogwira ntchito (°C) | 1600 ° C (ndi mpweya), 1700 ° C (kuchepetsa chilengedwe) |
| Zinthu za SiC | 99.96% |
| Zaulere za Si | <0.1% |
| Kuchulukana kwakukulu | 2.60-2.70 g / masentimita3 |
| Zowoneka porosity | < 16% |
| Kupanikizika kwamphamvu | > 600 MPa |
| Kuzizira kopinda mphamvu | 80-90 MPa (20°C) |
| Mphamvu yopindika yotentha | 90-100 MPa (1400°C) |
| Kukula kwa kutentha pa 1500°C | 4.70 10-6/°C |
| Thermal conductivity @ 1200 ° C | 23 W/m•K |
| Elastic moduli | 240 GPA |
| Thermal shock resistance | Zabwino kwambiri |
