ZapamwambaSiC Cantilever Paddleya Wafer Processing yopangidwa ndi vet-china imapereka yankho labwino kwambiri popanga semiconductor. Cantilever paddle iyi imapangidwa ndi zinthu za SiC (silicon carbide), ndipo kuuma kwake kwakukulu ndi kukana kutentha kumapangitsa kuti ikhale yogwira ntchito bwino pakutentha kwambiri komanso malo owononga. Mapangidwe a Cantilever Paddle amalola kuti mtandawo ukhale wodalirika panthawi yokonza, kuchepetsa chiopsezo chogawanika ndi kuwonongeka.
SiC Cantilever Paddlendi chigawo chapadera chomwe chimagwiritsidwa ntchito pazida zopangira semiconductor monga ng'anjo ya oxidation, ng'anjo yofalikira, ndi ng'anjo yowotchera, ntchito yayikulu ndikutsitsa ndikutsitsa zowotcha, zimathandizira ndi kunyamula zopatulira panthawi yotentha kwambiri.
Zomangamanga wambazaSiCcantileverpkuwonjezera: kapangidwe ka cantilever, kokhazikika kumapeto kwina ndi kopanda malire kwina, nthawi zambiri kumakhala ndi mawonekedwe athyathyathya komanso ngati paddle.
VET Energy imagwiritsa ntchito zida zoyeretsedwanso kwambiri za silicon carbide kuti zitsimikizire mtunduwo.
| Zakuthupi za Recrystallized Silicon Carbide | |
| Katundu | Mtengo Wodziwika |
| Kutentha kogwira ntchito (°C) | 1600 ° C (ndi mpweya), 1700 ° C (kuchepetsa chilengedwe) |
| Zinthu za SiC | 99.96% |
| Zaulere za Si | <0.1% |
| Kuchulukana kwakukulu | 2.60-2.70 g / masentimita3 |
| Zowoneka porosity | < 16% |
| Kupanikizika kwamphamvu | > 600MPa |
| Kuzizira kopinda mphamvu | 80-90 MPa (20°C) |
| Mphamvu yopindika yotentha | 90-100 MPa (1400°C) |
| Kukula kwa kutentha pa 1500°C | 4.70 10-6/°C |
| Thermal conductivity @ 1200 ° C | 23W/m•K |
| Elastic moduli | 240 GPA |
| Thermal shock resistance | Zabwino kwambiri |
Ubwino wa VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing ndi:
-Kukhazikika kwa kutentha kwakukulu: kungagwiritsidwe ntchito m'madera oposa 1600 ° C;
-Kukula kocheperako kwamafuta otsika: kumasunga kukhazikika, kuchepetsa chiwopsezo cha masamba opindika;
-Kuyera kwakukulu: chiopsezo chochepa cha kuipitsidwa kwachitsulo;
-Chemical inertness: zosagwira dzimbiri, zoyenera malo osiyanasiyana mpweya;
-Kulimba kwakukulu ndi kuuma: Kusavala, moyo wautali wautumiki;
-Kutentha kwabwino kwamafuta: kumathandizira pakuwotcha kofananako.
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