Momwe mungayeretsere bwato la graphite la PECVD?| Malingaliro a kampani VET Energy

1. Kuvomereza musanayeretse

1) PamenePECVD graphite bwato/ chonyamulira chimagwiritsidwa ntchito nthawi zopitilira 100 mpaka 150, wogwiritsa ntchito amayenera kuyang'ana momwe akukhalira munthawi yake. Ngati pali zokutira zachilendo, ziyenera kutsukidwa ndikutsimikiziridwa. Mtundu wanthawi zonse wopaka utoto wa silicon mu boti la graphite/chonyamulira ndi wabuluu. Ngati chowotchacho chili ndi buluu, mitundu ingapo, kapena kusiyana kwamitundu pakati pa zowola ndi zazikulu, ndi zokutira zachilendo, ndipo chifukwa chachilendocho chiyenera kutsimikiziridwa pakapita nthawi.
2) Pambuyo pa ndondomeko ogwira ntchito kusanthula ❖ kuyanika chikhalidwe chaPECVD graphite bwato/ chonyamulira, iwo adzawona ngati boti la graphite liyenera kutsukidwa komanso ngati mfundo ya khadi iyenera kusinthidwa, ndipo boti la graphite / chonyamulira chomwe chiyenera kutsukidwa chidzaperekedwa kwa ogwira ntchito zipangizo zoyeretsera.

 

3) Pambuyo pakebwato la graphite/ chonyamulira chawonongeka, opanga adzatulutsa zowotcha zonse za silicon mu boti la graphite ndikugwiritsa ntchito CDA (mpweya woponderezedwa) kuti asankhe zidutswa zabwato la graphite. Akamaliza, ogwira ntchito pazidazo amachikweza mu thanki ya asidi yomwe idakonzedwa ndi gawo lina la HF yankho loyeretsera.

 

2. Kuyeretsa bwato la graphite

Ndi bwino kugwiritsa ntchito 15-25% hydrofluoric acid njira yoyeretsa katatu, aliyense kwa maola 4-5, komanso nthawi ndi nthawi kutulutsa nayitrogeni panthawi yothira ndi kuyeretsa, ndikuwonjezera pafupifupi theka la ola la kuyeretsa; zindikirani: sizovomerezeka kugwiritsa ntchito mpweya mwachindunji ngati gwero la mpweya wophulika. Pambuyo pa pickling, yambani ndi madzi oyera kwa maola pafupifupi 10, ndikutsimikizira kuti bwato latsukidwa bwino. Mukamaliza kuyeretsa, chonde yang'anani pamwamba pa botilo, malo a graphite khadi ndi cholumikizira cha boti, ndi mbali zina kuti muwone ngati pali zotsalira za silicon nitride. Kenako ziume malinga ndi zofunikira.

3. Njira zodzitetezera kuyeretsa

A) Popeza asidi wa HF ndi chinthu chowononga kwambiri ndipo chimakhala ndi kusakhazikika kwina, ndizowopsa kwa ogwiritsa ntchito. Chifukwa chake, ogwira ntchito pamalo oyeretsera ayenera kusamala ndikusamalidwa ndi munthu wodzipereka.

B) Ndikoyenera kusokoneza bwato ndikuyeretsa gawo la graphite panthawi yoyeretsa, kotero kuti gawo lililonse lolumikizana likhoza kutsukidwa bwino. Pakadali pano, opanga ambiri apanyumba amagwiritsa ntchito kuyeretsa konse, komwe kuli kosavuta, koma chifukwa HF acid imawononga zida za ceramic, kuyeretsa kwathunthu kudzafupikitsa moyo wautumiki wa magawo omwe amagwirizana.