Choyamba, tiyenera kudziwaMtengo wa PECVD(Plasma Enhanced Chemical Vapor Deposition). Plasma ndi kuwonjezereka kwa kayendedwe ka kutentha kwa mamolekyu a zinthu. Kugundana pakati pawo kudzachititsa kuti mamolekyu a gasi akhale ionized, ndipo zinthuzo zidzakhala zosakaniza za ayoni oyenda momasuka, ma elekitironi ndi tinthu tating'onoting'ono tomwe timalumikizana.
Akuti chiwongolero cha kutayika kwa kuwala pa silicon pamwamba ndi pafupifupi 35%. Kanema wotsutsa-reflection amatha kusintha kwambiri mphamvu yogwiritsira ntchito kuwala kwa dzuwa ndi selo la batri, zomwe zimathandiza kuonjezera kachulukidwe kameneka kamene kamapangidwa ndi zithunzi ndipo motero kumapangitsa kuti kutembenuka kukhale bwino. Pa nthawi yomweyo, haidrojeni mu filimu passivates padziko batire selo, amachepetsa pamwamba recombination mlingo wa mphambano emitter, amachepetsa mdima panopa, kumawonjezera lotseguka dera voteji, ndi bwino photoelectric kutembenuka dzuwa. Kutentha kwapang'onopang'ono panthawi yowotcha kumaswa ma bond ena a Si-H ndi NH, ndipo H yomasulidwa imalimbitsanso batire.
Popeza kuti zida za silicon zamtundu wa photovoltaic zimakhala ndi zonyansa zambiri ndi zolakwika, nthawi yayitali yonyamula anthu ochepa komanso kutalika kwa silicon kumachepetsedwa, zomwe zimapangitsa kuchepa kwa kutembenuka kwa batri. H amatha kuchitapo kanthu ndi zolakwika kapena zonyansa mu silicon, potero kusamutsa gulu lamphamvu lomwe lili mu bandgap kupita ku gulu la valence kapena gulu loyendetsa.
1. Mfundo ya PECVD
Dongosolo la PECVD ndi ma jenereta angapo omwe amagwiritsa ntchitoPECVD graphite bwato ndi ma exciters a plasma apamwamba kwambiri. Jenereta ya plasma imayikidwa mwachindunji pakati pa mbale yophimba kuti ichite pansi pa kupanikizika kochepa komanso kutentha kwakukulu. Mipweya yogwira ntchito ndi silane SiH4 ndi ammonia NH3. Mipweya iyi imagwira ntchito pa silicon nitride yosungidwa pa silicon wafer. Mitundu yosiyanasiyana ya refractive ingapezeke posintha chiŵerengero cha silane kukhala ammonia. Panthawi yoyika, ma atomu ambiri a haidrojeni ndi ayoni a haidrojeni amapangidwa, zomwe zimapangitsa kuti hydrogen passivation ya wafer ikhale yabwino kwambiri. Mu vacuum ndi kutentha kozungulira kwa madigiri 480 Celsius, wosanjikiza wa SixNy amakutidwa pamwamba pa mtanda wa silicon poyendetsaPECVD graphite bwato.
3SiH4+4NH3 → Si3N4+12H2
2. Si3N4
Mtundu wa filimu ya Si3N4 umasintha ndi makulidwe ake. Nthawi zambiri, makulidwe abwino amakhala pakati pa 75 ndi 80 nm, omwe amawoneka abuluu wakuda. Mndandanda wa refractive wa kanema wa Si3N4 uli bwino pakati pa 2.0 ndi 2.5. Mowa nthawi zambiri umagwiritsidwa ntchito kuyeza index yake ya refractive.
Kuchita bwino kwambiri kwapamtunda, magwiridwe antchito owoneka bwino a anti-reflection (thickness refractive index matching), kutsika kwa kutentha (kuchepetsa bwino mtengo), ndi ma H ions opangidwa amadutsa pamwamba pa silicon wafer.
3. Nkhani zofananira pazokambirana zokutira
Makulidwe a kanema:
Nthawi yoyika ndi yosiyana ndi makulidwe osiyanasiyana a filimu. Nthawi yoyika iyenera kuwonjezeredwa kapena kuchepetsedwa moyenera malinga ndi mtundu wa zokutira. Ngati filimuyo ndi yoyera, nthawi yoyika iyenera kuchepetsedwa. Ngati ili lofiira, liyenera kuwonjezeka moyenera. Bwato lirilonse la mafilimu liyenera kutsimikiziridwa mokwanira, ndipo zinthu zolakwika siziloledwa kuyenda munjira yotsatira. Mwachitsanzo, ngati zokutira sizikuyenda bwino, monga mawanga amitundu ndi ma watermark, kuyera kofala kwambiri, kusiyana kwamitundu, ndi mawanga oyera pamzere wopangira ziyenera kusankhidwa munthawi yake. Kuyera pamwamba kumayamba chifukwa cha filimu yokhuthala ya silicon nitride, yomwe ingasinthidwe ndikusintha nthawi yoyika filimuyo; filimu yosiyanitsa mitundu imayamba makamaka chifukwa cha kutsekeka kwa njira ya gasi, kutayikira kwa chubu cha quartz, kulephera kwa microwave, ndi zina zambiri; mawanga oyera makamaka amayamba ndi mawanga ang'onoang'ono akuda mu ndondomeko yapitayi. Kuwunika kwa reflectivity, refractive index, etc., chitetezo cha mpweya wapadera, etc.
Mawanga oyera pamtunda:
PECVD ndi njira yofunika kwambiri m'maselo a dzuwa komanso chizindikiro chofunikira cha mphamvu ya ma cell a dzuwa a kampani. Njira ya PECVD nthawi zambiri imakhala yotanganidwa, ndipo gulu lililonse la maselo limayenera kuyang'aniridwa. Pali machubu ambiri opaka ng'anjo, ndipo chubu chilichonse chimakhala ndi ma cell mazana (kutengera zida). Pambuyo kusintha magawo ndondomeko, mkombero yotsimikizira ndi yaitali. Ukadaulo wokutira ndiukadaulo womwe makampani onse a photovoltaic amawona kuti ndizofunikira kwambiri. Kuchita bwino kwa ma cell a solar kumatha kupitilizidwa ndikuwongolera ukadaulo wokutira. M'tsogolomu, ukadaulo waukadaulo wa solar cell ukhoza kukhala wopambana muukadaulo wama cell a solar.
Nthawi yotumiza: Dec-23-2024