Vet-ChinaSilicon Carbide CeramicChophimba ndi chotchingira choteteza kwambiri chopangidwa molimba kwambiri komanso chosavalasilicon carbide (SiC)zakuthupi, zomwe zimapereka kukana kwa dzimbiri kwa mankhwala komanso kukhazikika kwa kutentha kwambiri. Makhalidwewa ndi ofunikira pakupanga semiconductor, koteroSilicon Carbide Ceramic Coatingamagwiritsidwa ntchito kwambiri pazigawo zazikulu za zida zopangira semiconductor.
Ntchito yeniyeni ya Vet-ChinaSilicon Carbide CeramicKupaka mu semiconductor kupanga ndi motere:
Limbikitsani kulimba kwa zida:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating imapereka chitetezo chabwino kwambiri chapamwamba cha zida zopangira semiconductor ndi kuuma kwake kwakukulu komanso kukana kuvala. Makamaka m'malo otentha kwambiri komanso owononga kwambiri, monga vapor deposition yamankhwala (CVD) ndi etching ya plasma, zokutira zimatha kuteteza pamwamba pa zida kuti zisawonongeke ndi kukokoloka kwa mankhwala kapena kuvala kwathupi, potero kumakulitsa kwambiri moyo wautumiki. zida ndi kuchepetsa kutsika chifukwa cha kusinthidwa pafupipafupi ndi kukonza.
Limbikitsani chiyero cha ndondomeko:Popanga semiconductor, kuipitsidwa kwakung'ono kumatha kuyambitsa kuwonongeka kwazinthu. Kusasunthika kwamankhwala a Silicon Carbide Ceramic Coating kumapangitsa kuti ikhale yokhazikika pansi pamikhalidwe yovuta kwambiri, kuteteza zinthuzo kuti zisatulutse tinthu tating'onoting'ono kapena zonyansa, potero zimatsimikizira kuyera kwa chilengedwe. Izi ndizofunikira kwambiri popanga masitepe omwe amafunikira kulondola kwambiri komanso ukhondo wapamwamba, monga PECVD ndi implantation ya ion.
Konzani kasamalidwe ka kutentha:Kutentha kwapamwamba kwambiri kwa semiconductor processing, monga kufulumira kwa kutentha kwapakati (RTP) ndi njira zowonongeka, kutentha kwapamwamba kwa Silicon Carbide Ceramic Coating kumathandizira kugawa kutentha kwa yunifolomu mkati mwa zipangizo. Izi zimathandizira kuchepetsa kupsinjika kwamatenthedwe komanso kusintha kwazinthu komwe kumachitika chifukwa cha kusinthasintha kwa kutentha, potero kumapangitsa kuti zinthu zizikhala zolondola komanso zogwirizana.
Thandizani zochitika zovuta za ndondomeko:Munjira zomwe zimafunikira kuwongolera kwakanthawi kochepa, monga ICP etching ndi PSS etching process, kukhazikika komanso kukana kwa oxidation kwa Silicon Carbide Ceramic Coating kumawonetsetsa kuti zidazo zimagwira ntchito mokhazikika pakanthawi yayitali, kuchepetsa chiwopsezo cha kuwonongeka kwa zinthu kapena kuwonongeka kwa zida chifukwa. kusintha kwa chilengedwe.
CVD SiC薄膜基本物理性能 Zida zoyambira za CVD SiCzokutira | |
性质 / Katundu | 典型数值 / Mtengo Wodziwika |
晶体结构 / Kapangidwe ka Crystal | FCC β gawo多晶,主要為(111)取向 |
密度 / Kuchulukana | 3.21g/cm³ |
硬度 / Kuuma | 2500 维氏硬度 (500g katundu) |
晶粒大小 / Mbewu SiZe | 2 ~ 10μm |
纯度 / Chemical Purity | 99.99995% |
热容 / Kutentha Kwambiri | 640 jkg-1·K-1 |
升华温度 / Sublimation Kutentha | 2700 ℃ |
抗弯强度 / Flexural Mphamvu | 415 MPa RT 4-mfundo |
杨氏模量 / Young's Modulus | 430 Gpa 4pt bend, 1300 ℃ |
导热系数 / ThermalConductivity | 300Wm-1·K-1 |
热膨胀系数 Kukula kwa Matenthedwe (CTE) | 4.5 × 10-6K-1 |
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