6 Iniha N ʻAno SiC Wafer

ʻO ka wehewehe pōkole:

ʻO ka 6 Inch N Type SiC Wafer mai VET Energy he substrate hana kiʻekiʻe i hoʻolālā ʻia no nā noi semiconductor kiʻekiʻe, e hāʻawi ana i ka conductivity thermal kiʻekiʻe a me ka pono o ka mana. Hoʻohana ʻo VET Energy i ka ʻenehana ʻokiʻoki e hana i nā wafers kiʻekiʻe e kū ana i nā koi koʻikoʻi o nā uila uila hou, e hōʻoiaʻiʻo ana i ka hilinaʻi a me ka lōʻihi o nā mea mana.


Huahana Huahana

Huahana Huahana

Hoʻolālā ʻia kēia 6 Inch N Type SiC Wafer no ka hoʻomaikaʻi ʻana i ka hana i nā kūlana koʻikoʻi, e lilo ia i koho kūpono no nā noi e koi ana i ka mana kiʻekiʻe a me ke kūpaʻa wela. ʻO nā huahana koʻikoʻi e pili ana i kēia wafer ʻo Si Wafer, SiC Substrate, SOI Wafer, a me SiN Substrate. Hōʻoia kēia mau mea i ka hana maikaʻi loa i nā ʻano hana hana semiconductor, hiki i nā mea hana i ʻoi aku ka ikaika a me ka lōʻihi.

No nā hui e hana pū ana me Epi Wafer, Gallium Oxide Ga2O3, Cassette, a i ʻole AlN Wafer, hāʻawi ka VET Energy's 6 Inch N Type SiC Wafer i ke kumu kūpono no ka hoʻomohala ʻana i nā huahana hou. Inā i loko o ka uila mana kiʻekiʻe a i ʻole ka mea hou loa i ka ʻenehana RF, hōʻoia kēia mau wafers i ka conductivity maikaʻi loa a me ka pale ʻana i ka wela liʻiliʻi, e koi ana i nā palena o ka pono a me ka hana.

第6页-36
第6页-35

OLELO HOOLAHA WAFERING

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

'ikamu

8-Inika

6-Iniha

4-Iniha

nP

n-Pm

n-Ps

SI

SI

TTV(GBIR)

≤6um

≤6um

Kakaka (GF3YFCD)-Waiwai Loa

≤15μm

≤15μm

≤25μm

≤15μm

Warp(GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV(SBIR)-10mmx10mm

<2μm

Wafer Edge

ʻO ka beveling

ILI HOPE

*n-Pm=n-type Pm-Grade,n-Ps=n-type Ps-Grade,Sl=Semi-lnsulating

'ikamu

8-Inika

6-Iniha

4-Iniha

nP

n-Pm

n-Ps

SI

SI

Hoʻopau ʻili

ʻaoʻao ʻelua Optical Polish, Si- Face CMP

ʻAhaʻulaʻula

(10um x 10um) Si-FaceRa≤0.2nm
C-Face Ra≤ 0.5nm

(5umx5um) Si-Face Ra≤0.2nm
C-Face Ra≤0.5nm

ʻOpeʻa lihi

ʻAʻohe ʻae ʻia (lōʻihi a laula≥0.5mm)

Indents

ʻAʻole ʻae ʻia

Nā ʻōpala (Si-Face)

Ka nui.≤5, Huihui
Length≤0.5×wafer anawaena

Ka nui.≤5, Huihui
Length≤0.5×wafer anawaena

Ka nui.≤5, Huihui
Length≤0.5×wafer anawaena

māwae

ʻAʻole ʻae ʻia

Hoʻokuʻu Edge

3mm

tech_1_2_size
下载 (2)

  • Mua:
  • Aʻe:

  • WhatsApp kamaʻilio pūnaewele!