Silicon Carbide Coated Graphite Substrate no Semiconductor, MOCVD Susceptor

Silicon Carbide Coated Graphite Substrate for Semiconductor, MOCVD Susceptor Kiʻi Hōʻikeʻike

ʻO ka wehewehe pōkole:

ʻO VET Energy SiC Coated Susceptor kahi huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūpaʻa a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ka like ʻana o ka wela, ka maʻemaʻe kiʻekiʻe, ka pale ʻana i ka erosion, e hana ana i ka hopena kūpono no nā noi hana wafer.

Kahi i kumu:Zhejiang, Kina (Mainland)

Helu kumu hoʻohālike:Helu kumu hoʻohālike:

Huina Kemika:graphite i uhi ʻia ʻo SiC

Ka ikaika wiliwili:470Mpa

ʻO ke kau wela wela:300 W/mK

ʻAno maikaʻi:hemolele

Hana:CVD-SiC

Noi:Semiconductor /Photovoltaic

ʻAiʻa:3.21 g/cc

Hoʻonui wela:4 10-6/K

lehu: <5ppm

Laʻana:Loaʻa

HS Code:6903100000

E hoʻouna i ka leka uila iā mākou Hoʻoiho ma ke ʻano he PDF

Huahana Huahana

VET Energy SiC Coated SusceptorHe hopena hana kiʻekiʻe i hana ʻia e hoʻopuka i ka hana hilinaʻi, kūpaʻa ma waena o kahi ola lōʻihi, e hālāwai ana i nā koi ikaika o ka hana semiconductor. Ke hōʻike nei i ke kūpaʻa wela ʻokoʻa, ka like ʻana o ka wela, a me ka maʻemaʻe kiʻekiʻe, kūpono kēia huahana no nā mea lawe wafer MOCVD a me nā noi hana wafer ʻē aʻe e koi ana i ke kūpaʻa a me ka pololei. ʻO kona kūpaʻa erosion ikaika e lilo ia i koho maikaʻi loa no nā kaiapuni kahi e pono ai ka lōʻihi a me ke kūpaʻa kemika.

ʻO kā mākouSiC Coated Graphite Susceptorke kū nei ma ke ʻano he mea koʻikoʻi i ke kaʻina hana semiconductor, e hoʻohana ana i ka ʻenehana patented kūʻokoʻa o VET Energy e hoʻokō ai i ka maʻemaʻe kiʻekiʻe loa, ka like ʻole o ka uhi ʻana, a me ke kūpaʻa wela. Hoʻonui ka uhi ʻana i ka substrate graphite me ke kūpaʻa kemika kiʻekiʻe a me ke ola lawelawe nui loa. ʻO ka hoʻolaʻa ʻana o VET Energy i ka maikaʻi ua hopena i kahi susceptor i uhi ʻia ʻo SiC e hoʻokō i nā pono e ulu ana o ka mākeke lawe wafer graphite, e hoʻonohonoho ana i kahi kūlana kiʻekiʻe no nā susceptor graphite i uhi ʻia ʻo SiC i hoʻohana ʻia maNā hana MOCVD.

ʻO nā hiʻohiʻona nui o ka SiC Coated Susceptors:

1. Kiekie-Mahana Oxidation Kū'ē:Hoʻopaʻa i nā mahana a hiki i 1700 ℃, kūpono ia no nā kūlana hana koʻikoʻi.

2. Hoʻomaʻemaʻe kiʻekiʻe a me Thermal Uniformity:E hōʻoia i nā hopena kūlike, mea nui noNā mea mālama MOCVDa me nā noi pololei ʻē aʻe.

3. Kūʻē ʻino maikaʻi loa:Paʻa i ka waikawa, ka alkali, ka paʻakai, a me nā mea hoʻokalakupua like ʻole.

4. Hoʻonui ʻia ka ʻili paʻakikī:ʻO ka ʻili paʻa me nā ʻāpana maikaʻi e hāʻawi i ka lōʻihi kiʻekiʻe a me ka lōʻihi.

5. Hoʻonui i ke ola lawelawe:Hana ʻia no ka hana hoʻomau, ʻoi aku ka maikaʻi ma mua o nā susceptors i uhi ʻia i ka carbide silicon maʻamau i nā kaiapuni hana paʻakikī.

Ma ke ʻano he mea hana koʻikoʻi, hoʻolaha ʻo VET Energy i ka graphite maʻamau anā huahana silika carbideme nā koho uhi like ʻole, meKa uhi ʻana o SiC, ka uhi ʻana o TaC, uhi kalapona aniani, a me ka uhi kalapona pyrolytic. Hāʻawi haʻaheo mākou i nā ʻoihana semiconductor a me photovoltaic, e hāʻawi ana i nā susceptors graphite i uhi ʻia i ka silicon carbide i hoʻokō i nā koi hana kikoʻī.

ʻO kā mākou hui ʻenehana, me ka ʻike mai nā keʻena noiʻi kūloko kiʻekiʻe, ua hoʻolaʻa ʻia i ka holomua ʻana i nā hoʻonā waiwai no nā pono e ulu nei o kaSusceptor graphite i uhi ʻia ʻo SiCmakeke. Ma o kā mākou kaʻina hana patented, ua hoʻomohala ʻo VET Energy i ka ʻenehana kūʻokoʻa e hoʻomaikaʻi nui i ka ikaika paʻa ma waena o ka silicon carbide coating a me ka substrate, e hōʻemi ana i ka pilikia o ka detachment a hoʻonui i ka hilinaʻi lōʻihi.

Nā noi a me nā pono i ka hana semiconductor

ʻO kaʻO ka uhi SiC no MOCVDhikigraphite susceptornā mea e mālama ai i ka pono ma lalo o ka wela wela a me ka corrosive environment, he mea nui ia no ka hana semiconductor precision. Ua waiwai nui kēia mau ʻāpana graphite i uhi ʻia ʻo SiC i nā kaʻina hana e koi ana i nā susceptors carbide-coated silicon nonā mea lawe wafer graphite, e koi ana i ke kūpaʻa wela kiʻekiʻe, ka maʻemaʻe, a me ke kūpaʻa ʻana i ka erosion kemika.

Me kā mākou ʻenehana hoʻoheheʻe silicon carbide kiʻekiʻe, hoʻomau ka VET Energy i ke kākoʻo ʻana i ka mākeke wafer wafer graphite ma o ka hāʻawi ʻana i ka hana maʻamau, hana kiʻekiʻe.Nā mea hoʻopili graphite i uhi ʻia ʻo SiCe hoʻoponopono i nā pilikia pili i ka ʻoihana, mai nā kaʻina MOCVD a i nā noi maʻemaʻe kiʻekiʻe ma ke kahua semiconductor.