RTP/RTA SiC Coating Carrier no MOCVD Epitaxial Growth

ʻO ka wehewehe pōkole:

ʻO VET Energy RTP/RTA SiC Coating Carrier kahi huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūpaʻa a hilinaʻi hoʻi i kahi manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ka like ʻana o ka wela, ka maʻemaʻe kiʻekiʻe, ka pale ʻana i ka erosion, e hana ana i ka hopena kūpono no nā noi hana wafer.


  • Kahi i kumu:Kina
  • Hoʻokumu Crystal:Māhele FCCβ
  • ʻO ka mānoanoa:3.21 g/cm
  • ʻoʻoleʻa:2500 Vickers
  • Ka nui o ka palaoa:2~10μm
  • Maʻemaʻe Kemika:99.99995%
  • Kaha wela:640J·kg-1·K-1
  • Mahana Sublimation:2700 ℃
  • Ka ikaika o ke kino:415 Mpa (RT 4-Point)
  • 'Ōpio Modulus :430 Gpa (4pt piko, 1300 ℃)
  • Hoʻonui Thermal (CTE):4.5 10-6K-1
  • ʻO ka wela wela:300(W/MK)
  • Huahana Huahana

    Huahana Huahana

    ʻO SiC Coating Carrier No RTP/RTA kahi mea nui i hoʻohana ʻia i nā kaʻina hana semiconductor i kapa ʻia ʻo Rapid Thermal Processing & Annealing, hoʻohana mākou i kā mākou ʻenehana patented e hana ai i ka mea lawe silicon carbide me ka maʻemaʻe kiʻekiʻe loa, ka like ʻana o ka uhi maikaʻi a me ke ola lawelawe maikaʻi loa. e like me ke kūpale kemika kiʻekiʻe a me nā waiwai kūpaʻa wela.

    Nā hiʻohiʻona o kā mākou huahana:

    1. Kiʻekiʻe wela oxidation kū'ē a hiki i 1700 ℃.
    2. ʻO ka hoʻomaʻemaʻe kiʻekiʻe a me ke kūlike wela
    3. ʻOi aku ka maikaʻi o ka corrosion resistance: acid, alkali, paʻakai a me nā mea hoʻohui.

    4. ʻO ka paʻakikī kiʻekiʻe, ka ʻili paʻa, nā ʻāpana maikaʻi.
    5. ʻOi aku ka lōʻihi o ke ola a ʻoi aku ka lōʻihi

    CVD SiC薄膜基本物理性能

    Nā waiwai kino kumu o CVD SiCka uhi ʻana

    性质 / Waiwai

    典型数值 / Waiwai maʻamau

    晶体结构 / Hoʻomoe Crystal

    Māhele FCC β多晶,主要为(111)取向

    密度 / Paʻa

    3.21 g/cm³

    硬度 / Oolea

    2500 维氏硬度(500g load)

    晶粒大小 / ʻAiʻa palaoa

    2~10μm

    纯度 / Maemae Kemika

    99.99995%

    热容 / Hikina Wela

    640 J·kg-1·K-1

    升华温度 / Kaumaha Sublimation

    2700 ℃

    抗弯强度 / Ka Ikaika Pilikia

    415 MPa RT 4-point

    杨氏模量 / 'Ōpio's Modulus

    430 Gpa 4pt piko, 1300 ℃

    导热系数 / ThermalʻO ka hoʻokō

    300W·m-1·K-1

    热膨胀系数 / Hoʻonui wela (CTE)

    4.5×10-6K-1

    1

    2

    ʻO VET Energy ka mea hana maoli i nā huahana graphite a me nā silicon carbide me nā ʻāpana like ʻole e like me ka uhi SiC, ka uhi TaC, ka uhi kalapona aniani, ka uhi kalapona pyrolytic, a me nā mea ʻē aʻe, hiki ke hāʻawi i nā ʻāpana like ʻole no ka semiconductor a me ka ʻoihana photovoltaic.

    Hele mai kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoihana hou aku no ʻoe.

    Hoʻomohala mau mākou i nā kaʻina hana kiʻekiʻe e hāʻawi i nā mea ʻoi aku ka holomua, a ua hana mākou i kahi ʻenehana patented kūʻokoʻa, hiki ke hoʻoikaika i ka paʻa ʻana ma waena o ka uhi a me ka substrate a ʻoi aku ka liʻiliʻi o ka wehe.

    Hoʻokipa maikaʻi iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou kāua!

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