I-Silicon Carbide Wafer Handling Paddle Eqinile

Incazelo emfushane:

I-vet-china inikeza i-Durable Silicon Carbide Wafer Handling Paddle enhle kakhulu, ehlanganisa ukusebenza okuphezulu kanye nomklamo omusha ukuze kuqinisekiswe ukuphathwa kwe-wafer okuyisicwecwana okuphumelelayo nokuphephile. Ngokuhlala isikhathi eside nokunemba kwayo, i-vet-china's silicon carbon wafer handling paddle iyithuluzi elibaluleke kakhulu ohlelweni lwakho lokukhiqiza i-semiconductor, elithuthukisa ukusebenza kahle kokukhiqiza kanye nokunciphisa ubungozi bemfucumfucu.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

i-vet-china iqinisekisa ukuthi yonke Ihlala isikhathi esideI-Silicon Carbide Wafer Handling Paddleinokusebenza okuhle kakhulu nokuqina. Lesi sigwedlo esiphethe i-silicon carbide wafer sisebenzisa izinqubo zokukhiqiza ezithuthukisiwe ukuze kuqinisekiswe ukuthi ukuqina kwesakhiwo nokusebenza kwayo kuhlala kusezingeni eliphezulu lokushisa kanye nezindawo zokugqwala kwamakhemikhali. Lo mklamo omusha uhlinzeka ngokusekela okuhle kakhulu kokuphathwa kwe-wafer ye-semiconductor, ikakhulukazi ekusebenzeni okuzenzakalelayo okunembayo okuphezulu.

I-SiC Cantilever Paddleiyisakhi esikhethekile esisetshenziswa emishinini yokukhiqiza ye-semiconductor efana nesithando somlilo se-oxidation, isithando somlilo esisakazwayo, nesithando somlilo esishisayo, ukusetshenziswa okuyinhloko ukulayisha nokuthulula i-wafer, isekela kanye nokuthutha ama-wafers ngesikhathi sezinqubo zokushisa okuphezulu.

Izakhiwo ezijwayelekilekweI-SiCci-antileverphlanganisa: isakhiwo se-cantilever, esimiswe ekugcineni kwesinye futhi sikhululekile kwenye, ngokuvamile sinomklamo oyisicaba futhi ofana nokugwedla.

Iyasebenzapi-rinciplekweI-SiCci-antileverphlanganisa:

I-cantilever paddle ingahamba iye phezulu futhi phansi noma emuva naphambili ngaphakathi kwegumbi lesithando somlilo, ingasetshenziswa ukuhambisa ama-wafers ukusuka ezindaweni zokulayisha kuya ezindaweni zokucubungula, noma ngaphandle kwezindawo zokucubungula, ukusekela nokusimamisa ama-wafers ngesikhathi sokucubungula izinga lokushisa eliphezulu.

Izakhiwo ezibonakalayo ze-Recrystallized Silicon Carbide

Impahla

Inani Elijwayelekile

Izinga lokushisa lokusebenza (°C)

1600°C (nomoya-mpilo), 1700°C (ukunciphisa imvelo)

Okuqukethwe kwe-SiC

> 99.96%

Mahhala Si okuqukethwe

< 0.1%

Ukuminyana ngobuningi

2.60-2.70 g/cm3

I-porosity ebonakalayo

< 16%

Amandla okucindezela

> 600 MPa

Amandla okugoba abandayo

80-90 MPa (20°C)

Amandla okugoba ashisayo

90-100 MPa (1400°C)

Ukunwetshwa kwe-Thermal @1500°C

4.70 10-6/°C

I-Thermal conductivity @1200°C

23 W/m•K

I-Elastic module

240 GPA

Ukumelana nokushaqeka okushisayo

Kuhle ngokwedlulele

I-Cantilever Paddle9
I-Cantilever Paddle8
研发团队2
生产设备1
公司客户1

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