I-Silicon Carbide Wafer Handling Paddle Eqinile

i-vet-china iqinisekisa ukuthi yonke Ihlala isikhathi esideI-Silicon Carbide Wafer Handling Paddleinokusebenza okuhle kakhulu nokuqina. Lesi sigwedlo esiphethe i-silicon carbide wafer sisebenzisa izinqubo zokukhiqiza ezithuthukisiwe ukuze kuqinisekiswe ukuthi ukuqina kwesakhiwo nokusebenza kwayo kuhlala kusezingeni eliphezulu lokushisa kanye nezindawo zokugqwala kwamakhemikhali. Lo mklamo omusha uhlinzeka ngokusekela okuhle kakhulu kokuphathwa kwe-wafer ye-semiconductor, ikakhulukazi ekusebenzeni okuzenzakalelayo okunembayo okuphezulu.

I-SiC Cantilever Paddleiyisakhi esikhethekile esisetshenziswa emishinini yokukhiqiza ye-semiconductor efana nesithando somlilo se-oxidation, isithando somlilo esisakazwayo, nesithando somlilo esishisayo, ukusetshenziswa okuyinhloko ukulayisha nokuthulula i-wafer, isekela kanye nokuthutha ama-wafers ngesikhathi sezinqubo zokushisa okuphezulu.

Izakhiwo ezijwayelekilekweI-SiCci-antileverphlanganisa: isakhiwo se-cantilever, esimiswe ekugcineni kwesinye futhi sikhululekile kwenye, ngokuvamile sinomklamo oyisicaba futhi ofana nokugwedla.

Iyasebenzapi-rinciplekweI-SiCci-antileverphlanganisa:

I-cantilever paddle ingahamba iye phezulu futhi phansi noma emuva naphambili ngaphakathi kwegumbi lesithando somlilo, ingasetshenziswa ukuhambisa ama-wafers ukusuka ezindaweni zokulayisha kuya ezindaweni zokucubungula, noma ngaphandle kwezindawo zokucubungula, ukusekela nokusimamisa ama-wafers ngesikhathi sokucubungula izinga lokushisa eliphezulu.