I-silicon carbide ye-ceramic coating heater

I-Vet-ChinaI-Silicon Carbide CeramicI-coating iyisivikelo esisebenza kahle kakhulu esenziwe ngokuqina ngokwedlulele futhi esingagugii-silicon carbide (SiC)impahla, enikeza ukumelana nokugqwala kwamakhemikhali okuhle kakhulu kanye nokuzinza kwezinga lokushisa eliphezulu. Lezi zici zibalulekile ekukhiqizeni kwe-semiconductor, ngakho-keI-Silicon Carbide Ceramic Coatingisetshenziswa kabanzi ezingxenyeni ezibalulekile zemishini yokukhiqiza ye-semiconductor.

Indima ethile ye-Vet-ChinaI-Silicon Carbide CeramicI-Coating in production semiconductor imi kanje:

Thuthukisa ukuqina kwemishini:I-Silicon Carbide Ceramic Coating I-Silicon Carbide Ceramic Coating inikeza isivikelo esihle kakhulu sangaphandle semishini yokukhiqiza i-semiconductor ngobulukhuni bayo obuphakeme kakhulu kanye nokumelana nokugqoka. Ikakhulukazi ezindaweni ezishisa kakhulu nezishisa kakhulu, ezifana ne-chemical vapor deposition (CVD) kanye ne-plasma etching, ukunamathela kungavimbela ngokuphumelelayo ingaphezulu lezinto zokusebenza ukuthi zingalinyazwa ukuguguleka kwamakhemikhali noma ukuguga komzimba, ngaleyo ndlela andise ngokuphawulekayo impilo yesevisi. imishini kanye nokunciphisa isikhathi sokuphumula okubangelwa ukushintshwa nokulungiswa njalo.

Thuthukisa ubumsulwa benqubo:Enqubweni yokukhiqiza i-semiconductor, ukungcoliswa okuncane kungase kubangele ukonakala komkhiqizo. I-inertness yamakhemikhali ye-Silicon Carbide Ceramic Coating ivumela ukuthi ihlale izinzile ngaphansi kwezimo ezimbi kakhulu, ivimbela impahla ekukhipheni izinhlayiya noma ukungcola, ngaleyo ndlela iqinisekise ukuhlanzeka kwemvelo kwenqubo. Lokhu kubaluleke kakhulu ezinyathelweni zokukhiqiza ezidinga ukunemba okuphezulu nokuhlanzeka okuphezulu, njenge-PECVD nokufakwa kwe-ion.

Lungiselela ukuphathwa kwe-thermal:Ekucubunguleni izinga lokushisa eliphezulu kwe-semiconductor, njengokucutshungulwa kwe-thermal okusheshayo (RTP) nezinqubo ze-oxidation, ukuqhutshwa kokushisa okuphezulu kwe-Silicon Carbide Ceramic Coating kwenza ukusatshalaliswa kwezinga lokushisa okufanayo ngaphakathi kwemishini. Lokhu kusiza ekunciphiseni ukucindezeleka okushisayo kanye nokuguqulwa kwezinto okubangelwa ukushintshashintsha kwezinga lokushisa, ngaleyo ndlela kuthuthukiswe ukunemba kokukhiqizwa komkhiqizo nokuvumelana.

Sekela izindawo zenqubo eyinkimbinkimbi:Ezinqubweni ezidinga ukulawulwa komkhathi okuyinkimbinkimbi, okufana nezinqubo ze-ICP etching kanye ne-PSS, ukuzinza nokumelana ne-oxidation kwe-Silicon Carbide Ceramic Coating kuqinisekisa ukuthi okokusebenza kugcina ukusebenza okuzinzile ekusebenzeni kwesikhathi eside, kunciphisa ubungozi bokuwohloka kwempahla noma ukulimala kwemishini ngenxa. ekushintsheni kwemvelo.