Indlela yokuhlanza isikebhe se-PECVD graphite?| Amandla we-VET

1. Ukuvuma ngaphambi kokuhlanza

1) Lapho i-Isikebhe se-graphite se-PECVD/ umthwali usetshenziswa izikhathi ezingaphezu kweziyi-100 kuye kweziyi-150, opharetha udinga ukubheka isimo sokumboza ngesikhathi. Uma kukhona ukunamathela okungavamile, kudinga ukuhlanzwa nokuqinisekiswa. Umbala ojwayelekile wokumboza we-silicon wafer esikebheni/isithwali se-graphite uluhlaza okwesibhakabhaka. Uma i-wafer inemibala engeyona eluhlaza okwesibhakabhaka, eminingi, noma umehluko wombala phakathi kwama-wafers mkhulu, i-wafer engavamile, futhi imbangela yokungajwayelekile idinga ukuqinisekiswa ngesikhathi.
2) Ngemva inqubo abasebenzi hlaziya isimo enamathela of theIsikebhe se-graphite se-PECVD/ umthwali, bazonquma ukuthi isikebhe se-graphite sidinga ukuhlanzwa nokuthi iphuzu lekhadi lidinga ukushintshwa, futhi isikebhe se-graphite / umthwali odinga ukuhlanzwa uzonikezwa izisebenzi zemishini ukuze zihlanzwe.

 

3) Ngemuva kwalokhoisikebhe se-graphite/ umthwali wonakele, izisebenzi zokukhiqiza zizokhipha zonke izingcezu ze-silicon esikebheni se-graphite futhi zisebenzise i-CDA (umoya ocindezelwe) ukuhlunga izingcezuisikebhe se-graphite. Ngemva kokuqedwa, abasebenzi bemishini bazoyiphakamisela ethangini le-asidi elilungiselelwe ngengxenye ethile yesisombululo se-HF sokuhlanza.

 

2. Ukuhlanza isikebhe se-graphite

Kunconywa ukusebenzisa isisombululo se-15-25% se-hydrofluoric acid emizuliswaneni emithathu yokuhlanza, ngayinye ngamahora angu-4-5, futhi ngezikhathi ezithile i-nitrogen ebhubhuzayo ngesikhathi sokucwiliswa nokuhlanza, wengeze cishe isigamu sehora sokuhlanza; Qaphela: akunconywa ukusebenzisa umoya ngqo njengomthombo wegesi wokubhubhudla. Ngemuva kokukhetha, hlambulula ngamanzi ahlanzekile amahora angaba ngu-10, futhi uqinisekise ukuthi isikebhe sihlanzwe kahle. Ngemva kokuhlanza, sicela uhlole ingaphezulu lesikebhe, iphoyinti lekhadi le-graphite kanye nokuhlanganyelwa kweshidi lesikebhe, nezinye izingxenye ukuze ubone ukuthi azikho yini izinsalela ze-silicon nitride. Bese womisa ngokwezidingo.

3. Izinyathelo zokuphepha zokuhlanza

A) Njengoba i-HF acid iyinto edla kakhulu futhi inokuguquguquka okuthile, iyingozi kuma-opharetha. Ngakho-ke, opharetha endaweni yokuhlanza kufanele bathathe izinyathelo zokuphepha futhi baphathwe umuntu ozinikele.

B) Kunconywa ukuhlakaza isikebhe futhi uhlanze kuphela ingxenye yegraphite ngesikhathi sokuhlanza, ukuze ingxenye ngayinye yokuxhumana ihlanzwe kahle. Njengamanje, abakhiqizi abaningi basekhaya basebenzisa ukuhlanza okuphelele, okulungile, kodwa ngenxa yokuthi i-HF acid igqwala izingxenye ze-ceramic, ukuhlanza jikelele kuzofinyeza impilo yesevisi yezingxenye ezihambisanayo.