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I-SiC Cantilever Paddle ethuthukisiwe yokucubungula i-wafer

Iphedi le-SiC Cantilever elithuthukisiwe lokucutshungulwa kwe-wafer yesithombe esifakiwe
  • I-SiC Cantilever Paddle ethuthukisiwe yokucubungula i-wafer
  • I-SiC Cantilever Paddle ethuthukisiwe yokucubungula i-wafer
  • I-SiC Cantilever Paddle ethuthukisiwe yokucubungula i-wafer

Incazelo emfushane:

I-Advanced SiC Cantilever Paddle for Wafer Processing eyethulwe ngabakwa-vet-china isebenzisa izinto ezisezingeni eliphezulu ze-SiC ukuze kuthuthukiswe ukusebenza kahle nokunemba kokucutshungulwa kwe-wafer. I-Vet-china's cantilever paddle ifaka ukumelana nokushisa okuhle kakhulu nokumelana nokugqwala, iqinisekisa ukusebenza okuzinzile kwe-wafer endaweni yokukhiqiza enokhahlo, okuyenza ibe yinketho ekahle yokuthuthukisa isivuno sokukhiqiza.


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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-AdvancedI-SiC Cantilever Paddleye-Wafer Processing eyenziwe yi-vet-china inikeza isisombululo esihle kakhulu sokukhiqiza i-semiconductor. Lesi sigwedlo se-cantilever senziwe ngezinto ze-SiC (silicon carbide), futhi ubulukhuni baso obuphezulu nokumelana nokushisa kuyenza ikwazi ukulondoloza ukusebenza okuhle kakhulu endaweni eshisa izikhotha nezimo ezonakalisayo. Idizayini ye-Cantilever Paddle ivumela i-wafer ukuthi isekelwe ngokuthembekile ngesikhathi sokucutshungulwa, ukunciphisa ubungozi bokuhlukaniswa nokulimala.

I-SiC Cantilever Paddleiyisakhi esikhethekile esisetshenziswa emishinini yokukhiqiza ye-semiconductor efana nesithando somlilo se-oxidation, isithando somlilo esisakazwayo, nesithando somlilo esishisayo, ukusetshenziswa okuyinhloko ukulayisha nokuthulula i-wafer, isekela kanye nokuthutha ama-wafers ngesikhathi sezinqubo zokushisa okuphezulu.

Izakhiwo ezivamilekweI-SiCci-antileverphlanganisa: isakhiwo se-cantilever, esimiswe ekugcineni kwesinye futhi sikhululekile kwenye, ngokuvamile sinomklamo oyisicaba futhi ofana nokugwedla.

I-VET Energy isebenzisa izinto zokuhlanzeka eziphakeme ze-silicon carbide ukuqinisekisa ikhwalithi.

Izakhiwo ezibonakalayo ze-Recrystallized Silicon Carbide

Impahla

Inani Elijwayelekile

Izinga lokushisa lokusebenza (°C)

1600°C (nomoya-mpilo), 1700°C (ukunciphisa imvelo)

Okuqukethwe kwe-SiC

> 99.96%

Mahhala Si okuqukethwe

< 0.1%

Ukuminyana ngobuningi

2.60-2.70 g/cm3

I-porosity ebonakalayo

< 16%

Amandla okucindezela

> 600I-MPa

Amandla okugoba abandayo

80-90 MPa (20°C)

Amandla okugoba ashisayo

90-100 MPa (1400°C)

Ukunwetshwa kwe-Thermal @1500°C

4.70 10-6/°C

I-Thermal conductivity @1200°C

23W/m•K

I-Elastic module

240 GPA

Ukumelana nokushaqeka okushisayo

Kuhle ngokwedlulele

Izinzuzo ze-VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing yilezi:

-Ukuzinza okuphezulu kwezinga lokushisa: kuyasebenziseka ezindaweni ezingaphezu kuka-1600 ° C;

-I-coefficient yokwandisa okushisayo ephansi: igcina ukuzinza kwe-dimensional, inciphisa ingozi ye-wafer warpage;

-Ukuhlanzeka okuphezulu: ingozi ephansi yokungcola kwensimbi;

-Ukungabi namandla kwamakhemikhali: ukumelana nokugqwala, kufanelekile ezindaweni ezihlukahlukene zegesi;

-Amandla aphezulu nobulukhuni: Ukungagugi, impilo ende yesevisi;

-I-thermal conductivity enhle: isiza ekushiseni kwe-wafer efanayo.

I-Cantilever Paddle10
I-Cantilever Paddle16
研发团队2
生产设备1
公司客户1
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