SiC Coated Graphite Susceptor Kuba Deep UV-LED

Inkcazelo emfutshane:

I-VET Energy SiC Coated Susceptor ye-LPE Epitaxial Growth yimveliso ephezulu yokusebenza eyenzelwe ukubonelela ngokusebenza okuhambelanayo kunye nokuthembekileyo kwixesha elide. Inokumelana nobushushu obuhle kakhulu kunye nokufana kwe-thermal, ukucoceka okuphezulu, ukuxhathisa ukhukuliseko, kuyenza ibe sisisombululo esifanelekileyo sokusetyenzwa kwe-wafer.

 

 


  • Indawo yemvelaphi:eTshayina
  • Ulwakhiwo lweCrystal:FCCβphase
  • Ubuninzi:3.21 g/cm;
  • Ukuqina:2500 Vickers;
  • Ubungakanani benkozo:2~10μm;
  • Ukucoceka kwemichiza:99.99995%;
  • Umthamo wobushushu:640J·kg-1·K-1;
  • Iqondo lobushushu eliphantsi:2700℃;
  • Amandla eFelexural:415 Mpa (RT 4-Point);
  • Imodyuli eNtsha:430 Gpa (4pt bend, 1300℃);
  • Ukwandiswa kweThermal (CTE):4.5 10-6K-1;
  • I-Thermal conductivity:300 (W/mK);
  • Iinkcukacha zeMveliso

    Iithegi zeMveliso

    I-SiC Coated Graphite Susceptor For Deep UV-LED licandelo eliphambili elisetyenziswa kwiinkqubo ezahlukeneyo zokuvelisa i-semiconductor. Sisebenzisa itekhnoloji yethu enelungelo elilodwa lomenzi wechiza ukwenza i-silicon carbide carrier ngokucoceka okuphezulu kakhulu, ukufana okuhle kokutyabeka kunye nobomi benkonzo obugqwesileyo, kunye nokumelana neekhemikhali eziphezulu kunye neempawu zokuzinza kwe-thermal.

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    Iimpawu zeemveliso zethu:

    1. Ukumelana nobushushu obuphezulu be-oxidation ukuya kuthi ga kwi-1700℃.
    2. Ukucoceka okuphezulu kunye nokufana kwe-thermal
    3. Ukumelana nokugqwesa okugqwesileyo: i-asidi, i-alkali, ityuwa kunye ne-organic reagents.

    4. Ubunzima obuphezulu, indawo edibeneyo, iincinci ezincinci.
    5. Ubomi benkonzo ende kwaye buhlala ixesha elide

    CVD SiC薄膜基本物理性能

    Iimpawu ezisisiseko ze-CVD SiCukutyabeka

    性质 / Ipropati

    典型数值 / Ixabiso eliqhelekileyo

    晶体结构 / Ulwakhiwo lweCrystal

    iFCC β isigaba多晶,主要為(111)取向

    密度 / Ubuninzi

    3.21 g/cm³

    硬度 / Ukuqina

    2500 维氏硬度 (500g umthwalo)

    晶粒大小 / Iinkozo uSiZe

    2 ~ 10μm

    纯度 / Ukucoceka kwemichiza

    99.99995%

    热容 / Umthamo wobushushu

    640 J·kg-1·K-1

    升华温度 / Iqondo lobushushu elisezantsi

    2700℃

    抗弯强度 / Amandla e-Flexural

    415 MPa RT 4-point

    杨氏模量 / Imodyuli yabaselula

    430 Gpa 4pt bend, 1300℃

    导热系数 / ThermalUkuqhuba

    300Wm-1·K-1

    热膨胀系数 / Ukwandiswa kweThermal(CTE)

    4.5×10-6K-1

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    I-VET Amandla ngumvelisi wokwenyani weemveliso zegraphite kunye ne-silicon carbide ezineengubo ezahlukeneyo ezifana nokwaleka kwe-SiC, i-TaC yokwambathisa, i-glassy carbon coating, i-pyrolytic carbon coating, njl., inokubonelela ngeendawo ezahlukeneyo ezilungiselelwe i-semiconductor kunye ne-photovoltaic industry.

    Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

    Sisoloko siphuhlisa iinkqubo eziphambili zokubonelela ngemathiriyeli ephucukileyo, kwaye sisebenze itekhnoloji eyodwa enelungelo elilodwa lomenzi wechiza, enokwenza iqhina phakathi kwengubo kunye ne-substrate ibe ngqongqo kwaye ingabikho lula ekuthinteleni.

    Wamkelekile ngokufudumeleyo ukuba undwendwele umzi-mveliso wethu, makhe sibenengxoxo eyongezelelekileyo!

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