Chikamu chechipiri chehafu -SiC epitaxial equipment parts

Tsanangudzo Pfupi:

Kusuma chigadzirwa uye kushandiswa: Yakabatanidzwa quartz chubhu, inogona kupfuudza gasi kutyaira tray base kutenderera, tembiricha kutonga.

Device nzvimbo yechigadzirwa: mukamuri yekupindura, kwete yakanangana newafer

Zvigadzirwa zvepasi pasi: zvishandiso zvemagetsi

Main terminal market: new energy mota


Product Detail

Product Tags

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SiC Yakaputirwa Graphite Halfmoon Chikamuis a keychikamu chinoshandiswa mukugadzira semiconductor maitiro, kunyanya kune SiC epitaxial michina.Isu tinoshandisa tekinoroji yedu ine patent kugadzira iyo halfmoon chikamu nayokuchena kwakanyanya,kugonacoatingkufananauye hupenyu hwesevhisi hwakanakisa, naizvozvowokukwirira kwemakemikari kuramba uye kupisa kwekugadzikana kwezvinhu.

VET Energy ndizvo themugadziri chaiye weakagadziridzwa graphite uye silicon carbide zvigadzirwa neCVD coating,anogona kupazvakasiyana-siyanazvakagadzirirwa zvikamu zve semiconductor uye photovoltaic indasitiri. Our tekinoroji timu inobva kumatunhu epamusoro ekutsvagisa dzimba, inogona kupa mamwe hunyanzvi zvinhu mhindurozvako.

Isu tinoramba tichigadzira advanced process kuti tipe zvimwe zvepamberi zvinhu,uyevakagadzira yakasarudzika tekinoroji ine patent, iyo inogona kuita kuti chisungo pakati pekupotera neiyo substrate ive yakasimba uye isinganyanye kubatwa.

Fmadyiro ezvigadzirwa zvedu:

1. High tembiricha oxidation kuramba kusvika 1700.
2. Kuchena kwepamusoro uyethermal kufanana
3. Yakanakisa corrosion resistance: acid, alkali, munyu uye organic reagents.
4. Kuoma kwepamusoro, compact surface, yakanaka particles.
5. Hupenyu hurefu hwebasa uye hunogara kwenguva refu

CVD SiC薄膜基本物理性能

Basic zvemuviri zvimiro zveCVD SiCcoating

性质 / Property

典型数值 / Typical Value

晶体结构 / Crystal Mamiriro

FCC β chikamu多晶,主要為(111)取向

密度 / Density

3.21 g/cm³

硬度 / Kuoma

2500 维氏硬度 (500g mutoro)

晶粒大小 / Zviyo SiZe

2~10μm

纯度 / Kemikari Kuchena

99.99995%

热容 / Kupisa Kugona

640 J·kg-1·K-1

升华温度 / Sublimation Temperature

2700 ℃

抗弯强度 / Flexural Simba

415 MPa RT 4-poindi

杨氏模量 / Young's Modulus

430 Gpa 4pt bend, 1300 ℃

导热系数 / ThermalConductivity

300Wm-1·K-1

热膨胀系数 / Kuwedzera Kupisa (CTE)

4.5 × 10-6K-1

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