Ua i ai nei le matou aufaigaluega sili ona lelei e faʻatautaia fesili mai tagata faʻatau. O la matou sini o le "100% faʻatauga faʻatau e ala i a matou oloa poʻo auaunaga sili ona lelei, faʻatau atu tau & a matou auvaa auaunaga" ma maua le fiafia mai le lauiloa tele i tagata faʻatau. Faatasi ai ma le tele o falegaosimea, e mafai ona matou ofoina atu le tele o tau Faʻaitiitia GaN-Basedepitaxial i luga o Sic Substrates 4′′, Matou te faʻafeiloaʻi ma le faʻafeiloaʻi au pisinisi laiti mai soʻo se ituaiga olaga, faʻamoemoe e faʻavae pisinisi faauo ma felagolagomai e faʻafesoʻotaʻi ma oe ma maua. ose faamoemoe manumalo-manumalo.
Ua i ai nei le matou aufaigaluega sili ona lelei e faʻatautaia fesili mai tagata faʻatau. O la matou sini o le "100% faʻatauga faʻatau e ala i a matou oloa poʻo auaunaga sili ona lelei, faʻatau atu tau & a matou auvaa auaunaga" ma maua le fiafia mai le lauiloa tele i tagata faʻatau. Faatasi ai ma le tele o falegaosimea, e mafai ona matou ofoina atu le tele o mea eseeseSaina GaN Substrates ma GaN Film, Matou te tulimatai atu ma le faamaoni e galulue faʻatasi ma tagata faʻatau i le lalolagi atoa. Matou te talitonu e mafai ona matou faʻamalieina oe i a matou oloa maualuga ma auaunaga atoatoa. Matou te faʻafeiloaʻi ma le faʻafeiloaʻi tagata faʻatau e asiasi i la matou kamupani ma faʻatau a matou oloa.
SiC coating graphite MOCVD Wafer carriers
O matou susceptors uma e faia i le maualuga-malosi isostatic graphite. Fa'amanuiaga mai le maualuga o le mama o tatou graphites - fa'atupuina fa'apitoa mo faiga lu'itau e pei o le epitaxy, fa'atupu tioata, fa'apipi'iina o le ion ma le fa'apipi'iina o le plasma, fa'apea fo'i ma le gaosiga o chips LED.
Fa'amatalaga o oloa
SiC coating of Graphite substrate mo Semiconductor talosaga e maua ai se vaega e sili atu le mama ma tetee atu i oxidizing atemosifia.
O le CVD SiC poʻo le CVI SiC o loʻo faʻaogaina i le Graphite o vaega faigofie pe lavelave mamanu. O le ufiufi e mafai ona faʻaoga i le mafiafia eseese ma i vaega tetele.
Compon
O faʻamanuiaga faʻapitoa o le matou SiC-coated graphite susceptors e aofia ai le mama maualuga, faʻapipiʻi tutusa ma se olaga sili ona lelei. E iai fo'i le maualuga o le kemikolo ma le mautu o le vevela.
Matou te fa'atumauina le fa'apalepale vavalalata pe a fa'aogaina le SiC coating, fa'aogaina le fa'aogaina o masini maualuga e fa'amautinoa ai se fa'ailoga susceptor toniga. Matou te gaosia fo'i mea e iai mea fa'aeletise lelei mo le fa'aogaina i faiga fa'avevela. O vaega uma ua mae'a o lo'o sau fa'atasi ma se tusi fa'amaonia mama ma fa'atatau.
Talosaga:
Vaega:
· Lelei le Tete'e Te'i Te'i
· Sili Fa'aletino Fa'ate'ia Tete'e
· Tete'e Sili Vailaau
· Mamalu Maualuga Maualuga
· Avanoa i Faiga Lavelave
· Faʻaaogaina i lalo ole Oxidizing AtmosphereMeatotino masani o mea fa'avae kalafi:
E aliali mai le To'atele: | 1.85 g/cm3 |
Tete'e eletise: | 11 μΩm |
Malosi fa'afoliga: | 49 MPa (500kgf/cm2) |
Maa'a o le matafaga: | 58 |
Lefulefu: | <5ppm |
Amioga vevela: | 116 W/mK (100 kcal/mhr-℃) |
Ua i ai nei le matou aufaigaluega sili ona lelei e faʻatautaia fesili mai tagata faʻatau. O la matou sini o le "100% faʻatauga faʻatau e ala i a matou oloa poʻo auaunaga sili ona lelei, faʻatau atu tau & a matou auvaa auaunaga" ma maua le fiafia mai le lauiloa tele i tagata faʻatau. Faatasi ai ma le tele o falegaosimea, e mafai ona matou ofoina atu le tele o tau Faʻaitiitia GaN-Basedepitaxial i luga o Sic Substrates 4′′, Matou te faʻafeiloaʻi ma le faʻafeiloaʻi au pisinisi laiti mai soʻo se ituaiga olaga, faʻamoemoe e faʻavae pisinisi faauo ma felagolagomai e faʻafesoʻotaʻi ma oe ma maua. ose faamoemoe manumalo-manumalo.
Tau fa'aitiitiaSaina GaN Substrates ma GaN Film, Matou te tulimatai atu ma le faamaoni e galulue faʻatasi ma tagata faʻatau i le lalolagi atoa. Matou te talitonu e mafai ona matou faʻamalieina oe i a matou oloa maualuga ma auaunaga atoatoa. Matou te faʻafeiloaʻi ma le faʻafeiloaʻi tagata faʻatau e asiasi i la matou kamupani ma faʻatau a matou oloa.