Fa'avevela kalafi Silisi carbide (SiC) SiC fa'apipi'i SiC fa'apipi'i

Fa'avevela kalafi Silisi carbide (SiC) SiC fa'apipi'i SiC fa'apipi'iina Ata Fa'aalia

Fa'amatalaga Puupuu:

O la matou fa'asoa e aofia ai mea fa'avevela, fa'amau lagolago, talipupuni vevela ma vaega fa'amama mo le tele o fa'agasologa ma mea e fa'atupu ai tioata.

Matou te tuʻuina atu foʻi susceptors mo le silicon epitaxy ma MOCVD reactors. E lauiloa mo a matou gaosiga faʻapitoa ma faʻapitoa faʻapitoa, matou te ofoina atu le faʻamaeʻaina faʻapitoa e ala i le faʻamamaina, gaosiga faʻainisinia poʻo le ufiufi.

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Fa'amatalaga Oloa

Faailoga o oloa

Fa'amatalaga Fa'apitoa	VET-M3
To'atele (g/cm3)	≥1.85
Fuafua (PPM)	≤500
Maaa o le matafaga	≥45
Tete'e Fa'apitoa (μ.Ω.m)	≤12
Malosi Fa'afilifili (Mpa)	≥40
Malosi fa'amalosi (Mpa)	≥70
Max. Tele o Saito (μm)	≤43
Coefficient o le fa'alauteleina o le vevela Mm/°C	≤4.4*10-6

O mea fou fa'afouga fou Graphite fa'avevela O mea lelei o le fa'asaoina o le malosi, maualuga le tau ma le tau maualalo o le tausiga.

O mea fou fa'afouga fou Graphite fa'avevela O mea lelei o le fa'asaoina o le malosi, maualuga le tau ma le tau maualalo o le tausiga.

O mea fou fa'afouga fou Graphite fa'avevela O mea lelei o le fa'asaoina o le malosi, maualuga le tau ma le tau maualalo o le tausiga.

Fa'amatalaga fa'apipi'i:

O mea fou fa'afouga fou Graphite fa'avevela O mea lelei o le fa'asaoina o le malosi, maualuga le tau ma le tau maualalo o le tausiga.

Muamua: Fa'asalaina Graphite Heater mo Semiconductor Silicon Wafer, SiC coating

Sosoo ai: Ta'iala Ma'i Ma'i Tulaga Maualuga Maualuga, Fa'au'umea E leai se Suau'u Graphite

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