MOCVD Substrate Heater, Elemene Fa'avevela mo MOCVD

Fa'amatalaga Puupuu:

Kemiki Graphite

A'oa'oga: Maualuluga le vevela

Talosaga: MOCVD/Ogaumu mama/Vavela Sone

Malosi tele:1.68-1.91g/cm3

Malosi fa'afoliga: 30-46Mpa

Resistivity: 7-12μΩm

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Fa'amatalaga Oloa

Faailoga o oloa

MOCVD Substrate Heater, Elemene Fa'avevela mo MOCVD

fa'avevela kafi:
O vaega faʻavevela graphite o loʻo faʻaaogaina i totonu o le ogaumu vevela maualuga ma le vevela e oʻo atu i le 2200 tikeri i le vacuum environment ma le 3000 tikeri i le siosiomaga kesi deoxidized ma faʻaofi.
Autu autu o le faʻavevela graphite:
1. tutusa o fausaga faamafanafana.
2. conductivity lelei eletise ma le mamafa eletise maualuga.
3. tete'e corrosion.
4. inoxidizability.
5. mama maualuga kemikolo.
6. malosi faʻainisinia maualuga.
O le lelei o le malosi lelei, maualuga le tau ma maualalo le tausiga.
E mafai ona tatou gaosia le anti-oxidation ma le umi o le ola o le graphite crucible, graphite mold ma vaega uma o le graphite heater.
Fa'ailoga autu ole fa'avevela graphite:

Fa'amatalaga Fa'apitoa	VET-M3
To'atele (g/cm3)	≥1.85
Fuafua (PPM)	≤500
Maaa o le matafaga	≥45
Tete'e Fa'apitoa (μ.Ω.m)	≤12
Malosi fa'afoliga (Mpa)	≥40
Malosi fa'amalosi (Mpa)	≥70
Max. Tele o Saito (μm)	≤43
Coefficient o le fa'alauteleina o le vevela Mm/°C	≤4.4*10-6

O le faʻavevela o le graphite mo le ogaumu eletise o loʻo i ai meatotino o le vevela, faʻamaʻi faʻamaʻiina, lelei eletise eletise ma sili atu le malosi faʻainisinia. E mafai ona matou masini ituaiga eseese o faʻavevela graphite e tusa ai ma mamanu a tagata faʻatau.