6 Inisi N Ituaiga SiC Wafer

Fa'amatalaga Puupuu:

O le 6 Inisi N Type SiC Wafer mai le VET Energy o se mea e maualuga le faatinoga ua fuafuaina mo fa'aoga semiconductor maualuga, e ofoina atu le maualuga o le vevela ma le malosi o le eletise. E fa'aogaina e le VET Energy fa'atekonolosi fa'aonaponei e fa'atupuina ai masi fa'atauva'a maualuga e fetaui ma mana'oga fa'aeletonika fa'aonaponei, fa'amautinoa le fa'atuatuaina ma le tumau i masini eletise.


Fa'amatalaga Oloa

Faailoga o oloa

O lenei 6 Inisi N Type SiC Wafer ua fa'ainisinia mo le fa'aleleia atili o le fa'atinoga i tulaga ogaoga, ma avea ai ma filifiliga lelei mo talosaga e mana'omia ai le malosi maualuga ma le vevela. O oloa autu e feso'ota'i ma lenei fa'ato'aga e aofia ai le Si Wafer, SiC Substrate, SOI Wafer, ma le SiN Substrate. O mea nei e fa'amautinoa ai le fa'atinoina lelei i le tele o faiga fa'agaio'iga semiconductor, e mafai ai ona fa'aogaina masini e lelei uma le malosi ma tumau.

Mo kamupani o lo'o galulue ma Epi Wafer, Gallium Oxide Ga2O3, Cassette, po'o AlN Wafer, VET Energy's 6 Inch N Type SiC Wafer e maua ai le fa'avae talafeagai mo le atina'eina o oloa fou. Pe i totonu o le eletise maualuga poʻo le mea aupito lata mai i tekinolosi RF, o nei wafers e faʻamautinoa ai le lelei o le amio ma le laʻititi o le vevela, tuleia tuaoi o le lelei ma le faʻatinoga.

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FAAMATALAGA WAFERING

*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating

Aitema

8-Inisi

6-Inisi

4-Inisi

nP

n-Pm

n-Sa

SI

SI

TTV(GBIR)

≤6um

≤6um

Aufana(GF3YFCD)-Taua atoatoa

≤15μm

≤15μm

≤25μm

≤15μm

A'ai(GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV(SBIR)-10mmx10mm

<2μm

Wafer Edge

Fa'ata'oto

FA'ATA'U LUGA

*n-Pm=n-ituaiga Pm-Vaega,n-Ps=n-ituaiga Ps-Vaega,Sl=Semi-lnsulating

Aitema

8-Inisi

6-Inisi

4-Inisi

nP

n-Pm

n-Sa

SI

SI

Fa'ai'uga

Itulua Optical Polish, Si- Face CMP

Lau'ele'ele

(10um x 10um) Si-FaceRa≤0.2nm
C-Face Ra≤ 0.5nm

(5umx5um) Si-Face Ra≤0.2nm
C-Face Ra≤0.5nm

Tipi Chips

Leai se Fa'ataga (umi ma le lautele≥0.5mm)

Indents

Leai se Fa'ataga

Manu'ese(Si-Fua'i)

Qty.≤5, Fa'aopoopo
Length≤0.5×wafer diameter

Qty.≤5, Fa'aopoopo
Length≤0.5×wafer diameter

Qty.≤5, Fa'aopoopo
Length≤0.5×wafer diameter

Ta'eta'ei

Leai se Fa'ataga

Tuusaunoaga Tupito

3mm

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