SiC

VET ENERGY, Uyobora manuafacturer wa CVD SIC ikozwe mubushinwa

Ibikoresho bihindura ejo hazaza

Carbide ya Silicon (SiC) nigikoresho gishya cya semiconductor. Carbide ya silicon ifite icyuho kinini (hafi inshuro 3 silikoni), imbaraga zikomeye zumurima (hafi inshuro 10 silicon), ubushyuhe bwinshi bwumuriro (hafi inshuro 3 silikoni). Nibintu byingenzi bizakurikiraho-igice cya semiconductor ibikoresho. Ibikoresho bya SiC bikoreshwa cyane mu nganda ziciriritse hamwe n’ifoto yizuba. By'umwihariko, suseptors ikoreshwa mugukura kwa epitaxial ya LED na Si imwe ya kirisiti ya kirisiti isaba gukoresha igifuniko cya SiC. Bitewe no kuzamuka kwinshi kwa LED mu kumurika no kwerekana inganda, hamwe niterambere rikomeye ryinganda ziciriritse,Igicuruzwa cya SiCibyiringiro nibyiza cyane.

GUSHYIRA MU BIKORWA

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Gusaba ibicuruzwa nibikorwa                                                                                               Ibicuruzwa nibikoreshwa

Si inganda imwe ya kristu, GaN, AlN, safiro nizindi ntebe za MOCVD. -Graphite base coating for imwe ya kristu ya silicon epitaxial gukura

Imikorere nyamukuru: isuku ryinshi, kurwanya isuri, gutwara ubushyuhe bwinshi, - inzira ya MOCVD, igishushanyo mbonera cya grafite yo gukura kwa GaN epitaxial

ubushyuhe bwinshi bwo guhangana, coefficente yo kwagura ubushyuhe buke.

 

Inganda zikoresha inganda
Inganda zikoresha inganda
Inganda zikoresha inganda
Imirasire y'izuba

 

Amashanyarazi 250 W / m ° K. Uburyo bwa Laser flash, RT
Kwagura Ubushyuhe (CTE) 4.5 x 10-6° K. Icyumba cyicyumba kugeza 950 ° C, dilatometero silika
       Umutungo Agaciro Uburyo
Ubucucike 3.21 g / cc Kurohama-kureremba hamwe nubunini
Ubushyuhe bwihariye 0,66 J / g ° K. Flash flash
Imbaraga zoroshye 450 MPa 560 MPa Ingingo 4 yunamye, RT4 igoramye, 1300 °
Gukomera kuvunika 2.94 MPa m1 / 2 Microindentation
Gukomera 2800 Vicker, umutwaro wa 500g
Modulus Yumusore Modulus 450 GPa430 GPa 4 pt yunamye, RT4 yunamye, 1300 ° C.
Ingano y'ibinyampeke 2 - 10 µm SEM

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Isuku, Imiterere ya SEM, isesengura ryubunini bwaSiC

Ubuziranenge bwibikoresho bya SiC kuri grafite ukoresheje CVD bingana na 99,9995%. Imiterere yacyo ni fcc. Filime za SiC zishushanyije kuri grafite ni (111) yerekanwe nkuko bigaragara mu makuru ya XRD (Igishusho.1) yerekana ubwiza bwayo bwa kristu. Ubunini bwa firime ya SiC burasa cyane nkuko bigaragara ku gishushanyo cya 2.

SEM amakuru ya CVD SiC yoroheje, ubunini bwa kristu ni 2 ~ 1 Opm

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Igishushanyo 2: imyenda yuburebure bwa firime ya SiC

Imiterere ya kristu ya firime ya CVD SiC ni isura ya cubic yubatswe, kandi icyerekezo cyo gukura kwa firime kiri hafi 100%

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SEM na XRD ya beta - SiC film kuri grafite

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URUBUGA RWA CRYSTAL SILICON EPITAXIAL

Imikorere yibicuruzwa hamwe nibisabwa.

Carbide ya Silicon (SiC) yatwikiriweshingiro niryo shingiro ryiza rya kirisiti imwe ya kirisiti na GaN epitaxy, nicyo kintu cyibanze kigize itanura rya epitaxy. Shingiro nigikoresho cyingenzi cyibikoresho bya silicon ya monocrystalline kumirongo minini ihuriweho. Ifite isuku nyinshi, irwanya ubushyuhe bwinshi, irwanya ruswa, ubukana bwiza bwikirere nibindi bintu byiza biranga ibintu.

Gusaba ibicuruzwa no gukoresha

Igishushanyo mbonera cya graphite yo gukura kwa kristu imwe ya silicon epitaxial Ikwiranye nimashini za Aixtron, nibindi .Gutwika uburebure: 90 ~ 150umUmurambararo wa wafer ni 55mm.

AMAFOTO YUMUKARA

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igishushanyo mbonerakuri kristu imwe ya kirisiti yuburyo bukurura

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umusaruro umwe rukumbi wa kirisiti ya silicon yinganda kuburyo bukurura,amababi atatunkubushyuhe bwo hejuru hamwe nibice bitwara ubushyuhe bumwe, umuyoboro utemba nkumuyoboro wa gazi usohora umuyoboro wogutwara ibice, umuyoboro utemba nkumuyoboro wa gazi usohora
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Ibiranga ibicuruzwa
Kurwanya ubushyuhe, kurwanya ruswa, kuramba kuramba, birashobora kuzamura ubwiza nibisohoka bya wafer. Hamwe na coefficente nkeya cyane yo kwaguka kwubushyuhe, kurwanya ubushyuhe bwinshi, kwihanganira kwambara cyane, kubika neza, imiti ihamye, hafi yumutuku (umutuku) hanze yumucyo ugaragara.
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Kuki uduhitamo

Ibikoresho byumwuga hamwe nitsinda

Icyiciro 1000 amahugurwa adafite ivumbi

*metero zirenga 3000 za 1000 zamahugurwa atagira ivumbi

*Amakoperative R & D itsinda ryubumenyi bwubushinwa

*Ibikoresho byihariye byo gupima no gupima neza

*Ubushobozi buhagije kandi bufite ireme86b0afaa78106ff600d26e97300491b

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3034

Serivise yihuse

Kumurongo wateganijwe mbere, itsinda ryacu ryo kugurisha ryumwuga rishobora gusubiza ikibazo cyawe muminota 50-100 mugihe cyamasaha yakazi no mumasaha 12 mugihe cya hafi. Igisubizo cyihuse kandi cyumwuga kizagufasha gutsinda umukiriya wawe hamwe nuburyo bwiza bwo gukora neza.

Kuburyo bwo gutumiza, itsinda ryabakozi bacu babigize umwuga bazajya bafata amashusho buri minsi 3 kugeza kuri 5 kugirango amakuru yawe ya 1 avugururwe yumusaruro kandi batange ibyangombwa mugihe cyamasaha 36 kugirango bavugurure aho ubwikorezi bugeze. Twite cyane kuri serivisi nyuma yo kugurisha.

Kuri nyuma yo kugurisha, itsinda ryacu rya serivise rihora rikomeza guhura nawe kandi uhora uhagaze kumurimo wawe. Ababigize umwuga nyuma yo kugurisha ndetse harimo kuguruka injeniyeri zacu kugirango bagufashe gukemura ibibazo kurubuga. Garanti yacu ni amezi 12 nyuma yo kubyara.

Ibisobanuro birambuye

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Ningbo VET Energy Technology Co., Ltd ni uruganda rukora ibice bya grafite, cyane cyane mugutezimbere ibikoresho bishya bya semiconductor no kwibanda kubushakashatsi niterambere ryububiko bwa SiC. Ibicuruzwa nyamukuru byuru ruganda ni siyose ikozwe na SiC yinganda za LED ninganda za silicon monocrystalline. Filime ya SiC ikoreshwa mu nganda za LED n'inganda za silikoni ya monocrystalline ni cubic phase, ifite imiterere ya lattice imwe na diyama, kandi ubukana bwayo ni bwiza nka diyama. Carbide ya silicon nikintu kinini cyakuze cyagutse cya semiconductor, kandi gifite ibyifuzo byinshi mubikorwa byinganda. Byongeye kandi, karbide ya silicon ifite ubushyuhe bwinshi, coefficente ntoya yo kwagura ubushyuhe, ubushyuhe bwo hejuru (hafi dogere selisiyusi 2700), hamwe no kurwanya ruswa. Ibicuruzwa bitwikiriye silicon karbide bikoreshwa cyane mu kirere, mu nganda zifotora, ingufu za kirimbuzi, gari ya moshi yihuta, amamodoka n’izindi nganda.

Ibibazo

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