8 Inch P Ubwoko bwa Silicon Wafer

Ibisobanuro bigufi:

Kumenyekanisha premium-grade 8 Inch P Ubwoko bwa Silicon Wafer, ikiranga indashyikirwa muri VET Ingufu. Iyi wafer idasanzwe, yerekana umwirondoro wa P wo mu bwoko bwa Doping, yakozwe muburyo bwitondewe kugirango yujuje ubuziranenge bwo hejuru nibikorwa.


Ibicuruzwa birambuye

Ibicuruzwa

Ubwoko bwa 8 Inch P Ubwoko bwa Silicon Wafer buva muri VET Ingufu nigikorwa cyo hejuru cyane cya silicon wafer yagenewe ibintu byinshi byifashishwa bya semiconductor, harimo imirasire yizuba, ibikoresho bya MEMS, hamwe nizunguruka. Azwiho kuba afite amashanyarazi meza kandi akora neza, iyi wafer niyo ihitamo kubakora ibicuruzwa bashaka gukora ibikoresho byizewe kandi byiza bya elegitoroniki. Ingufu za VET zitanga urugero rwiza rwa doping hamwe nubuso buhanitse bwo kurangiza kubikoresho byiza.

Ubwoko bwa 8 Inch P Ubwoko bwa Silicon Wafers burahujwe rwose nibikoresho bitandukanye nka SiC Substrate, SOI Wafer, SiN Substrate, kandi birakwiriye gukura kwa Epi Wafer, byemeza ko bihindagurika muburyo bwo gukora igice cya kabiri cyogukora. Wafer irashobora kandi gukoreshwa ifatanije nibindi bikoresho byubuhanga buhanitse nka Gallium Oxide Ga2O3 na AlN Wafer, bigatuma biba byiza kubisekuruza bizaza. Igishushanyo cyabo gikomeye kandi gihuye neza na sisitemu ishingiye kuri Cassette, itanga umusaruro unoze kandi mwinshi.

Ingufu za VET zitanga abakiriya ibisubizo byihariye bya wafer. Turashobora guhitamo wafer hamwe nuburwanya butandukanye, ibirimo ogisijeni, ubunini, nibindi dukurikije ibyo abakiriya bakeneye. Mubyongeyeho, turatanga kandi inkunga ya tekiniki yumwuga na nyuma yo kugurisha kugirango dufashe abakiriya gukemura ibibazo bitandukanye bahura nabyo mugihe cyibikorwa.

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KUBONA UMWIHARIKO

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo

8-Inch

6-Inch

4-Inch

nP

n-Pm

n-Zab

SI

SI

TTV (GBIR)

≤6um

≤6um

Umuheto (GF3YFCD) -Agaciro keza

≤15μm

≤15μm

≤25μm

≤15μm

Intambara (GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV (SBIR) -10mmx10mm

<2 mm

Wafer Edge

Beveling

BURUNDU

* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating

Ingingo

8-Inch

6-Inch

4-Inch

nP

n-Pm

n-Zab

SI

SI

Kurangiza

Impande ebyiri Optical Polonye, ​​Si- Isura CMP

Ubuso

(10um x 10um) Si-FaceRa≤0.2nm
C-Isura Ra≤ 0.5nm

(5umx5um) Si-Isura Ra≤0.2nm
C-Isura Ra≤0.5nm

Imipira

Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm)

Ibimenyetso

Nta na kimwe cyemewe

Igishushanyo (Si-Isura)

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer

Qty.≤5, Guhuriza hamwe
Uburebure≤0.5 × diameter ya wafer

Ibice

Nta na kimwe cyemewe

Guhezwa

3mm

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