Ubwoko bwa 8 Inch P Ubwoko bwa Silicon Wafer buva muri VET Ingufu nigikorwa cyo hejuru cyane cya silicon wafer yagenewe ibintu byinshi byifashishwa bya semiconductor, harimo imirasire yizuba, ibikoresho bya MEMS, hamwe nizunguruka. Azwiho kuba afite amashanyarazi meza kandi akora neza, iyi wafer niyo ihitamo kubakora ibicuruzwa bashaka gukora ibikoresho byizewe kandi byiza bya elegitoroniki. Ingufu za VET zitanga urugero rwiza rwa doping hamwe nubuso buhanitse bwo kurangiza kubikoresho byiza.
Ubwoko bwa 8 Inch P Ubwoko bwa Silicon Wafers burahujwe rwose nibikoresho bitandukanye nka SiC Substrate, SOI Wafer, SiN Substrate, kandi birakwiriye gukura kwa Epi Wafer, byemeza ko bihindagurika muburyo bwo gukora igice cya kabiri cyogukora. Wafer irashobora kandi gukoreshwa ifatanije nibindi bikoresho byubuhanga buhanitse nka Gallium Oxide Ga2O3 na AlN Wafer, bigatuma biba byiza kubisekuruza bizaza. Igishushanyo cyabo gikomeye kandi gihuye neza na sisitemu ishingiye kuri Cassette, itanga umusaruro unoze kandi mwinshi.
Ingufu za VET zitanga abakiriya ibisubizo byihariye bya wafer. Turashobora guhitamo wafer hamwe nuburwanya butandukanye, ibirimo ogisijeni, ubunini, nibindi dukurikije ibyo abakiriya bakeneye. Mubyongeyeho, turatanga kandi inkunga ya tekiniki yumwuga na nyuma yo kugurisha kugirango dufashe abakiriya gukemura ibibazo bitandukanye bahura nabyo mugihe cyibikorwa.
KUBONA UMWIHARIKO
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
TTV (GBIR) | ≤6um | ≤6um | |||
Umuheto (GF3YFCD) -Agaciro keza | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Intambara (GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2 mm | ||||
Wafer Edge | Beveling |
BURUNDU
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
Kurangiza | Impande ebyiri Optical Polonye, Si- Isura CMP | ||||
Ubuso | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Isura Ra≤0.2nm | |||
Imipira | Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm) | ||||
Ibimenyetso | Nta na kimwe cyemewe | ||||
Igishushanyo (Si-Isura) | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | ||
Ibice | Nta na kimwe cyemewe | ||||
Guhezwa | 3mm |