VET Ingufu za santimetero 12 za SOI wafer ni ibikoresho bikora cyane bya semiconductor substrate material, itoneshwa cyane kubintu byiza byamashanyarazi nuburyo budasanzwe. Ingufu za VET zikoresha uburyo bwa SOI bwa wafer bwo gukora kugirango tumenye neza ko wafer ifite umuvuduko muke cyane, umuvuduko mwinshi hamwe n’imirasire irwanya imirasire, bitanga urufatiro rukomeye rwimikorere ikora cyane.
Umurongo wibicuruzwa bya VET ntabwo bigarukira gusa kuri wafers ya SOI. Dutanga kandi ibikoresho byinshi bya semiconductor substrate, harimo Si Wafer, SiC Substrate, SiN Substrate, Epi Wafer, nibindi, hamwe nibikoresho bishya bigari bya semiconductor nka Gallium Oxide Ga2O3 na AlN Wafer. Ibicuruzwa birashobora guhaza ibyifuzo byabakiriya batandukanye muri electronics power, RF, sensor hamwe nizindi nzego.
Twibanze ku kuba indashyikirwa, wafers yacu ya SOI ikoresha kandi ibikoresho bigezweho nka gallium oxyde Ga2O3, cassettes na waN wa AlN kugirango tumenye neza kandi neza kuri buri rwego. Izere ingufu za VET gutanga ibisubizo bigezweho bitanga inzira yiterambere ryikoranabuhanga.
Fungura ubushobozi bwumushinga wawe hamwe nibikorwa byiza bya VET Ingufu za 12-SOI wafers. Ongera ubushobozi bwawe bwo guhanga udushya hamwe na wafers ikubiyemo ubuziranenge, busobanutse no guhanga udushya, ushireho urufatiro rwo gutsinda muburyo bukomeye bwikoranabuhanga rya semiconductor. Hitamo VET Ingufu za premium SOI wafer ibisubizo birenze ibyateganijwe.
KUBONA UMWIHARIKO
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
TTV (GBIR) | ≤6um | ≤6um | |||
Umuheto (GF3YFCD) -Agaciro keza | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Intambara (GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2 mm | ||||
Wafer Edge | Beveling |
BURUNDU
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
Kurangiza | Impande ebyiri Optical Polonye, Si- Isura CMP | ||||
Ubuso | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Isura Ra≤0.2nm | |||
Imipira | Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm) | ||||
Ibimenyetso | Nta na kimwe cyemewe | ||||
Igishushanyo (Si-Isura) | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | ||
Ibice | Nta na kimwe cyemewe | ||||
Guhezwa | 3mm |