vet-china na-eme ka ọ bụrụ nke ọ bụla na-adịgide adịgideSilicon Carbide Wafer Ejikwa Paddlenwere ezigbo arụmọrụ na anwụ ngwa ngwa. Ihe eji eme ihe na-eji silicon carbide wafer na-eji usoro nrụpụta dị elu iji hụ na nkwụsi ike na arụ ọrụ ya ka dị na oke okpomọkụ yana gburugburu corrosion kemịkalụ. Nhazi ọhụrụ a na-enye nkwado dị mma maka njikwa wafer semiconductor, ọkachasị maka arụmọrụ akpaaka dị elu.
SiC Cantilever Paddlebụ ihe pụrụ iche nke eji eme ihe na ihe nrụpụta semiconductor dị ka ọkụ oxidation, ọkụ na-ekesa, na ọkụ na-ekpo ọkụ, ihe bụ isi bụ maka nbudata na nbudata, na-akwado ma na-ebufe wafers n'oge usoro okpomọkụ dị elu.
Ọdịdị nkịtịnkeSiCcantileverpaddle: ihe owuwu cantilever, nke edobere n'otu nsọtụ yana n'efu n'akụkụ nke ọzọ, na-enwekarị atụmatụ dị larịị na paddle.
Na-arụ ọrụpisiokwunkeSiCcantileverpaddle:
Ngwunye cantilever nwere ike ịkwaga elu na ala ma ọ bụ azụ na azụ n'ime ụlọ ọkụ ọkụ, ọ nwere ike iji mee ka wafer si na ebe a na-ebu ibu na mpaghara nhazi, ma ọ bụ site na ebe nhazi, na-akwado na ịkwado wafers n'oge nhazi okpomọkụ.
Njirimara anụ ahụ nke Silicon Carbide recrystallized | |
Ngwongwo | Uru a na-ahụkarị |
Okpomọkụ na-arụ ọrụ (°C) | 1600C (ya na oxygen), 1700C (mbelata gburugburu ebe obibi) |
SiC ọdịnaya | > 99.96% |
Ọdịnaya Si efu | <0.1% |
Nnukwu njupụta | 2.60-2.70 g / cm3 |
Porosity pụtara | <16% |
Ike mkpakọ | > 600 MPa |
Ike na-ehulata oyi | 80-90 MPa (20°C) |
Ike na-ehulata ọkụ | 90-100 MPa (1400°C) |
Mgbasa ọkụ @1500°C | 4.70 10-6/°C |
Nrụpụta okpomọkụ @1200°C | 23 W/m•K |
Modulu nke na-agbanwe agbanwe | 240 GPA |
Mgbochi ujo okpomọkụ | Dị oke mma |