Mpempe akwụkwọ eserese Silicon Carbide mkpuchi maka Semiconductor, MOCVD Susceptor

Nkọwa dị mkpirikpi:

VET Energy SiC Coated Susceptor bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.

Ebe amụrụ:Zhejiang, China (Mainland)

Nọmba nlereanya:Nọmba nlereanya:

Ngwakọta kemịkalụ:SiC mkpuchi graphite

Ike mgbanwe:470Mpa

Nrụpụta ọkụ:300 W/mK

Ogo:Zuru oke

Ọrụ:CVD-SiC

Ngwa:Semiconductor/Photovoltaic

Njupụta:3.21 g/cc

Mgbasa ọkụ:4 10-6/K

Ash: <5ppm

Ọmụmaatụ:dị

Koodu HS:6903100000

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Nkọwa ngwaahịa

Mkpado ngwaahịa

VET Energy SiC Coated Susceptorbụ ihe ngwọta dị elu nke arụpụtara nke ọma iji wepụta arụmọrụ a pụrụ ịdabere na ya, na-agbanwe agbanwe n'ogologo ndụ, na-egbo mkpa siri ike nke nrụpụta semiconductor. N'igosi nguzogide okpomọkụ pụrụ iche, ịdị n'otu okpomọkụ dị elu, yana ịdị ọcha dị elu, ngwaahịa a dị mma maka ndị na-ebu MOCVD wafer na ngwa nhazi wafer ndị ọzọ na-achọ nkwụsi ike na nkenke. Nguzogide mbuze ya siri ike na-eme ka ọ bụrụ nhọrọ kacha mma maka gburugburu ebe ịdịte aka na nkwụghachi kemịkalụ dị mkpa.

AnyịIhe mkpuchi graphite Susceptor SiCguzo dị ka akụkụ dị oke mkpa na usoro nrụpụta semiconductor, na-eji teknụzụ pụrụ iche nke VET Energy nweta ikike ịdị ọcha dị oke elu, otu mkpuchi dị elu, yana nkwụsi ike dị egwu. Ihe mkpuchi ahụ na-eme ka mkpụrụ osisi graphite na-eguzogide ọgwụ dị elu na ndụ ọrụ ogologo oge. Nraranye nke VET Energy maka ịdịmma arụpụtala ihe mkpuchi mkpuchi SiC nke na-egbo mkpa na-agbanwe agbanwe nke ahịa graphite wafer carrier, na-esetịpụ ụkpụrụ dị elu maka ndị na-ahụ maka graphite mkpuchi SiC ejiri mee ihe naUsoro MOCVD.

Akụkụ ndị bụ isi nke Susceptors mkpuchi SiC:

1. Nguzogide Oxidation dị elu:Nagide okpomọkụ ruo 1700 ℃, na-eme ka ọ dabara maka ọnọdụ nhazi oke.

2. Ịdị ọcha dị elu na ịdị n'otu okpomọkụ:Na-eme ka nsonaazụ na-agbanwe agbanwe, dị mkpa makaMOCVD susceptorsna ngwa ndị ọzọ nkenke.

3. Nguzogide nrụrụ dị mma:Na-eguzogide acid, alkali, nnu, na reagents organic dị iche iche.

4. Ekelitere elu ike ike:Kọmpat elu na ezi ahụ na-enye elu anwụ ngwa ngwa na ogologo ndụ.

5. Ogologo oge ije ozi:Emebere ya maka ịrụ ọrụ na-aga n'ihu, na-arụpụta ihe mkpuchi silicon carbide na gburugburu ebe nhazi siri ike.

Dị ka onye na-eduga emeputa, VET Energy ọkachamara na graphite ahaziri nangwaahịa silicon carbidena nhọrọ mkpuchi dị iche iche, gụnyeremkpuchi SiC, Mkpuchi TaC, enyo mkpuchi carbon, na mkpuchi carbon pyrolytic. Anyị ji nganga na-ejere semiconductor na ụlọ ọrụ fotovoltaic ozi, na-ebuga silicon carbide mkpuchi graphite susceptors nke na-egbo mkpa arụmọrụ.

Ndị otu teknụzụ anyị, nwere ahụmịhe sitere na ụlọ ọrụ nyocha ụlọ kacha elu, raara onwe ya nye ịkwalite ihe ngwọta ihe maka mkpa na-agbanwe agbanwe.Susceptor graphite nwere mkpuchi SiCahịa. Site na usoro patent anyị, VET Energy ewepụtala teknụzụ pụrụ iche nke na-eme ka ike nkekọ dị n'etiti mkpuchi silicon carbide na mkpụrụ, na-ebelata ihe ize ndụ nke ịwepu na ịkwalite ntụkwasị obi ogologo oge.

Ngwa na uru dị na nhazi Semiconductor

NkeIhe mkpuchi SiC maka MOCVDna-enyere akagraphite susceptorakụrụngwa iji nọgide na-eguzosi ike n'ezi ihe n'okpuru ọnọdụ okpomọkụ dị elu na nke na-emebi emebi, nke dị mkpa maka mmepụta semiconductor ziri ezi. Akụkụ graphite mkpuchi SiC ndị a bara uru karịsịa na usoro chọrọ susceptors silicon carbide maka.ndị na-ebu graphite wafer, nke na-achọ nkwụsi ike nke okpomọkụ dị elu, ịdị ọcha, na iguzogide mbuze kemịkal.

Site na usoro mkpuchi mkpuchi silicon carbide dị elu, VET Energy na-aga n'ihu na-akwado ahịa ndị na-ebu graphite wafer site na ibuga ahaziri iche, arụmọrụ dị elu.Ihe mkpuchi graphite nwere mkpuchi SiCnke na-eleba anya ihe ịma aka ndị ụlọ ọrụ dị iche iche, site na usoro MOCVD gaa na ngwa dị ọcha dị elu na mpaghara semiconductor.