NkeEkpuchiri Silicon Carbide Akwụkwọ EpitaxialGbalịa jiri n'imeNgwa Epitaxial Furnacenke Vet Energy mere na China, nke bụ otu n'ime ndị na-emepụta ihe na ndị na-ebubata ya na China. ZụrụEkpuchiri Silicon Carbide Akwụkwọ EpitaxialA na-eji tray eme ihe na ChinaNgwa Epitaxial Furnacena ọnụ ala dị ala site na ụlọ ọrụ anyị. Anyị nwere ụdị nke anyị ma anyị na-akwado nnukwu. Ọ bụrụ na ị nwere mmasị na ngwaahịa anyị, anyị ga-enye gị ọnụ ahịa ọnụ ahịa. Nabata ịzụta ngwaahịa mbelata nke kachasị ọhụrụ na nke kachasị mma n'aka anyị.
Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ oyi akwa mkpuchi SIC.
Isi atụmatụ:
1. Nguzogide oxidation dị elu:
Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.
2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.
3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.
4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.
Nkọwa isi nke mkpuchi CVD-SIC:
| Njirimara SiC-CVD | ||
| Ọdịdị kristal | FCC β oge | |
| Njupụta | g/cm ³ | 3.21 |
| Isi ike | Vickers isi ike | 2500 |
| Nha ọka | μm | 2 ~ 10 |
| Ịdị ọcha kemịkalụ | % | 99,99995 |
| Ike ikpo ọkụ | J·kg-1· K-1 | 640 |
| Sublimation okpomọkụ | ℃ | 2700 |
| Ike Felexural | MPa (RT 4-isi) | 415 |
| Modul nke Young | GPA (4pt gbagọọ, 1300 ℃) | 430 |
| Mgbasawanye okpomọkụ (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
Gịnị mere ị ga-eji họrọ vet?
1) anyị nwere nkwa ngwaahịa zuru oke.
2) nkwakọ ngwaahịa ọkachamara na-eme ka ngwaahịa ahụ sie ike. A ga-ebugara gị ngwaahịa a n'enweghị nsogbu.
3) ọwa ngwa ngwa ndị ọzọ na-enyere aka ịnyefe gị ngwaahịa.
