NkeEkpuchiri Silicon Carbide Akwụkwọ EpitaxialGbalịa jiri n'imeNgwa Epitaxial Furnacenke Vet Energy mere na China, nke bụ otu n'ime ndị na-emepụta ihe na ndị na-ebubata ya na China. Zụrụ Silicon Carbide mkpuchi Epitaxial Mpempe akwụkwọ eji eme ihe na China Epitaxial Furnace Akụrụngwa na ọnụ ala dị ala site na ụlọ ọrụ anyị. Anyị nwere ụdị nke anyị ma anyị na-akwado nnukwu. Ọ bụrụ na ị nwere mmasị na ngwaahịa anyị, anyị ga-enye gị ọnụ ahịa ọnụ ahịa. Nabata ịzụta ngwaahịa mbelata nke kachasị ọhụrụ na nke kachasị mma n'aka anyị.
Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ oyi akwa mkpuchi SIC.
Isi atụmatụ:
1. Nguzogide oxidation dị elu:
Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.
2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.
3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.
4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.
Nkọwa isi nke mkpuchi CVD-SIC:
Njirimara SiC-CVD | ||
Ọdịdị kristal | FCC β oge | |
Njupụta | g/cm ³ | 3.21 |
Isi ike | Vickers isi ike | 2500 |
Nha ọka | μm | 2 ~ 10 |
Ịdị ọcha kemịkalụ | % | 99,99995 |
Ike ikpo ọkụ | J·kg-1· K-1 | 640 |
Sublimation okpomọkụ | ℃ | 2700 |
Ike Felexural | MPa (RT 4-isi) | 415 |
Modul nke Young | GPA (4pt gbagọọ, 1300 ℃) | 430 |
Mgbasawanye okpomọkụ (CTE) | 10-6K-1 | 4.5 |
Thermal conductivity | (W/mK) | 300 |
Gịnị mere ị ga-eji họrọ vet?
1) anyị nwere nkwa ngwaahịa zuru oke.
2) nkwakọ ngwaahịa ọkachamara na-eme ka ngwaahịa ahụ sie ike. A ga-ebugara gị ngwaahịa a n'enweghị nsogbu.
3) ọwa ngwa ngwa ndị ọzọ na-enyere aka ịnyefe gị ngwaahịa.