4 inch GaN na SiC Wafer

4 inch GaN na onyonyo egosipụtara SiC Wafer

Nkọwa dị mkpirikpi:

VET Energy's 4-inch GaN na SiC wafer bụ ngwaahịa mgbanwe n'ọhịa nke ngwa eletrọnịkị. Wafer a na-ejikọta ezigbo ọkụ ọkụ nke silicon carbide (SiC) na njupụta ike dị elu na obere mfu nke gallium nitride (GaN), na-eme ka ọ bụrụ nhọrọ dị mma maka ịme ngwa ngwa dị elu na ngwaọrụ dị elu. VET Energy na-ahụ na arụmọrụ dị mma na nkwụsi ike nke wafer site na teknụzụ epitaxial MOCVD dị elu.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Ahịrị ngwaahịa VET Energy ejedebeghị na GaN na wafer SiC. Anyị na-enyekwa ihe dị iche iche nke semiconductor ihe, gụnyere Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, wdg. Na mgbakwunye, anyị na-arụsi ọrụ ike na-emepụta ihe ọhụrụ bandgap semiconductor, dị ka Gallium Oxide Ga2O3 na AlN. Wafer, iji gboo mkpa ụlọ ọrụ eletrọnịkị ike n'ọdịnihu maka ngwaọrụ arụmọrụ dị elu.

VET Energy na-enye ọrụ nhazi mgbanwe na-agbanwe agbanwe, ma nwee ike ịhazi GaN epitaxial layers nke ọkpụrụkpụ dị iche iche, ụdị doping dị iche iche, na nha wafer dị iche iche dịka mkpa ndị ahịa siri dị. Na mgbakwunye, anyị na-enyekwa nkwado teknụzụ ọkachamara na ọrụ ire ere iji nyere ndị ahịa aka ngwa ngwa mepụta ngwa elektrọn ike dị elu.

Nkọwapụta WAFERING

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.

Ihe	8-anụ ọhịa	6-anụ ọhịa			4-anụ ọhịa
Ihe	nP	n-Pm	n-Ps	SI	SI
TTV(GBIR)	≤6um	≤6um
Ụta(GF3YFCD)-Uru zuru oke	≤15μm	≤15μm	≤25μm		≤15μm
Warp(GF3YFER)	≤25μm	≤25μm	≤40μm		≤25μm
LTV(SBIR) -10mmx10mm	<2μm
Wafer Edge	Beveling

IMEcha elu elu

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.

Ihe	8-anụ ọhịa	6-anụ ọhịa			4-anụ ọhịa
	nP	n-Pm	n-Ps	SI	SI
Emecha elu elu	Akụkụ abụọ Optical Polish, Si- Face CMP
Ọdịdị elu	(10um x 10um) Si-FaceRa≤0.2nm C-Ihu Ra≤ 0.5nm			(5umx5um) Si-Face Ra≤0.2nm C-Ihu Ra≤0.5nm
ibe ibe	Ọnweghị nke ekwenyere (ogologo na obosara≥0.5mm)
Indents	Ọnweghị nke ekwenyere
Scratches (Si-Ihu)	Qty.≤5,Nchịkọta Ogologo≤0.5 × dayameta wafer	Qty.≤5,Nchịkọta Ogologo≤0.5 × dayameta wafer			Qty.≤5,Nchịkọta Ogologo≤0.5 × dayameta wafer
Mgbawa	Ọnweghị nke ekwenyere
Mwepu ihu	3mm