VET Energy's 8-inch silicon wafers ka a na-ejikarị na ngwa eletrọnịkị ike, sensọ, sekit agbakwunyere na mpaghara ndị ọzọ. Dịka onye ndu na ụlọ ọrụ semiconductor, anyị na-agba mbọ ịnye ngwaahịa Si Wafer dị elu iji gboo mkpa na-eto eto nke ndị ahịa anyị.
Na mgbakwunye na Si Wafer, VET Energy na-enyekwa ihe dị iche iche nke semiconductor substrate, gụnyere SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, wdg. ahịrị ngwaahịa anyị na-ekpuchikwa ihe ọhụrụ bandgap semiconductor dị ka Gallium Oxide Ga2O3 na AlN. Wafer, na-enye nkwado siri ike maka mmepe nke ngwaọrụ eletrọnịkị nke ọgbọ ọzọ.
VET Energy nwere akụrụngwa mmepụta ihe dị elu yana usoro njikwa njikwa zuru oke iji hụ na wafer ọ bụla na-agbaso ụkpụrụ ụlọ ọrụ siri ike. Ngwaahịa anyị abụghị naanị nwere ezigbo ọkụ eletrik, ma nweekwa ike nrụpụta dị mma na nkwụsi ike ọkụ.
VET Energy na-enye ndị ahịa ihe ngwọta wafer ahaziri ahazi, gụnyere wafers nke nha dị iche iche, ụdị na itinye uche doping. Tụkwasị na nke ahụ, anyị na-enyekwa nkwado ọrụ ọkachamara ọkachamara na ọrụ ahịa mgbe ọ gasịrị iji nyere ndị ahịa aka dozie nsogbu dị iche iche zutere n'oge usoro mmepụta.
Nkọwapụta WAFERING
*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.
Ihe | 8-anụ ọhịa | 6-anụ ọhịa | 4-anụ ọhịa | ||
nP | n-Pm | n-Ps | SI | SI | |
TTV(GBIR) | ≤6um | ≤6um | |||
Ụta(GF3YFCD)-Uru zuru oke | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV(SBIR) -10mmx10mm | <2μm | ||||
Wafer Edge | Beveling |
IMEcha elu elu
*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.
Ihe | 8-anụ ọhịa | 6-anụ ọhịa | 4-anụ ọhịa | ||
nP | n-Pm | n-Ps | SI | SI | |
Emecha elu elu | Akụkụ abụọ Optical Polish, Si- Face CMP | ||||
Ọdịdị elu | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
ibe ibe | Ọnweghị nke ekwenyere (ogologo na obosara≥0.5mm) | ||||
Indents | Ọnweghị nke ekwenyere | ||||
Scratches (Si-Ihu) | Qty.≤5,Nchịkọta | Qty.≤5,Nchịkọta | Qty.≤5,Nchịkọta | ||
Mgbawa | Ọnweghị nke ekwenyere | ||||
Mwepu ihu | 3mm |