Silicon Wafer dị 8 inch dị ọcha

Nkọwa dị mkpirikpi:

VET Energy's silicon wafers nke anụ ọhịa 8 dị ọcha bụ ezigbo nhọrọ gị maka nrụpụta semiconductor. Emere site na iji teknụzụ dị elu, wafers ndị a nwere ọmarịcha kristal na ịdị larịị dị elu, na-eme ka ha dabara maka nrụpụta ngwaọrụ microelectronic dị iche iche.


Nkọwa ngwaahịa

Mkpado ngwaahịa

VET Energy's 8-inch silicon wafers ka a na-ejikarị na ngwa eletrọnịkị ike, sensọ, sekit agbakwunyere na mpaghara ndị ọzọ. Dịka onye ndu na ụlọ ọrụ semiconductor, anyị na-agba mbọ ịnye ngwaahịa Si Wafer dị elu iji gboo mkpa na-eto eto nke ndị ahịa anyị.

Na mgbakwunye na Si Wafer, VET Energy na-enyekwa ihe dị iche iche nke semiconductor substrate, gụnyere SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, wdg. ahịrị ngwaahịa anyị na-ekpuchikwa ihe ọhụrụ bandgap semiconductor dị ka Gallium Oxide Ga2O3 na AlN. Wafer, na-enye nkwado siri ike maka mmepe nke ngwaọrụ eletrọnịkị nke ọgbọ ọzọ.

VET Energy nwere akụrụngwa mmepụta ihe dị elu yana usoro njikwa njikwa zuru oke iji hụ na wafer ọ bụla na-agbaso ụkpụrụ ụlọ ọrụ siri ike. Ngwaahịa anyị abụghị naanị nwere ezigbo ọkụ eletrik, ma nweekwa ike nrụpụta dị mma na nkwụsi ike ọkụ.

VET Energy na-enye ndị ahịa ihe ngwọta wafer ahaziri ahazi, gụnyere wafers nke nha dị iche iche, ụdị na itinye uche doping. Tụkwasị na nke ahụ, anyị na-enyekwa nkwado ọrụ ọkachamara ọkachamara na ọrụ ahịa mgbe ọ gasịrị iji nyere ndị ahịa aka dozie nsogbu dị iche iche zutere n'oge usoro mmepụta.

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Nkọwapụta WAFERING

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.

Ihe

8-anụ ọhịa

6-anụ ọhịa

4-anụ ọhịa

nP

n-Pm

n-Ps

SI

SI

TTV(GBIR)

≤6um

≤6um

Ụta(GF3YFCD)-Uru zuru oke

≤15μm

≤15μm

≤25μm

≤15μm

Warp(GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV(SBIR) -10mmx10mm

<2μm

Wafer Edge

Beveling

IMEcha elu elu

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara ala.

Ihe

8-anụ ọhịa

6-anụ ọhịa

4-anụ ọhịa

nP

n-Pm

n-Ps

SI

SI

Emecha elu elu

Akụkụ abụọ Optical Polish, Si- Face CMP

Ọdịdị elu

(10um x 10um) Si-FaceRa≤0.2nm
C-Ihu Ra≤ 0.5nm

(5umx5um) Si-Face Ra≤0.2nm
C-Ihu Ra≤0.5nm

ibe ibe

Ọnweghị nke ekwenyere (ogologo na obosara≥0.5mm)

Indents

Ọnweghị nke ekwenyere

Scratches (Si-Ihu)

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Mgbawa

Ọnweghị nke ekwenyere

Mwepu ihu

3mm

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