SiC Coated Graphite Susceptor Rau Deep UV-LED

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VET Energy SiC Coated Susceptor rau LPE Epitaxial Kev Loj Hlob yog cov khoom lag luam ua tau zoo tsim los muab kev ua tau zoo thiab txhim khu kev qha nyob rau lub sijhawm ntev.Nws muaj super zoo kub tsis kam thiab thermal uniformity, siab purity, yaig kuj, ua rau nws zoo meej tov rau wafer ua daim ntaub ntawv.

Qhov Chaw Keeb Kwm:Tuam Tshoj

Crystal Structure:FCCβ theem

Ceev:3.21 g / cm3;

Hardness:2500 Vickers;

Loj Loj:2 ~ 10m;

Tshuaj Purity:99.99995%;

Thaum tshav kub kub muaj peev xwm:640J·kg-1·K-1;

Sublimation kub:2700 ℃;

Felexural zog:415 Mpa (RT 4-Point);

Young's Modulus:430 Gpa (4pt khoov, 1300 ℃);

Thermal Expansion (CTE):4.5 10-6K-1;

Thermal conductivity:300 (W / mK);

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Khoom cim npe

SiC Coated Graphite Susceptor Rau Deep UV-LED yog cov khoom siv tseem ceeb siv hauv ntau cov txheej txheem tsim khoom semiconductor.Peb siv peb cov cuab yeej patented los ua cov neeg nqa khoom silicon carbide nrog cov purity siab heev, zoo txheej txheej thiab muaj kev pab cuam lub neej zoo, nrog rau cov tshuaj muaj zog thiab thermal stability.

Feature ntawm peb cov khoom:

1. Kub kub oxidation tsis kam mus txog 1700 ℃.
2. High purity thiab thermal uniformity
3. Zoo heev corrosion kuj: acid, alkali, ntsev thiab organic reagents.
4. High hardness, compact nto, zoo hais.
5. Lub neej ua haujlwm ntev dua thiab ruaj khov dua

CVD SiC薄膜基本物理性能 Basic Physical Properties ntawm CVD SiCtxheej
性质 / Khoom	典型数值 / Tus nqi
晶体结构 / Crystal Structure	FCC β theem多晶, 主要为(111) Ib
密度 / Ceev	3.21 g / cm³
硬度 / Hardness	2500 维氏硬度 (500g load)
晶粒大小 / Grain SiZe	2 ~ 10 hli
纯度 / Tshuaj Purity	99.99995%
Cov duab / Kub Muaj Peev Xwm	6 40j kg^-1· K^-1
升华温度 / Sublimation kub	2700 ℃
抗弯强度 / Flexural zog	415 MPa RT 4-point
杨氏模量 / Young's Modulus	430 Gpa 4pt khoov, 1300 ℃
导热系数 / KublKev coj ua	300 Wm^-1· K^-1
热膨胀系数 / Thermal Expansion (CTE)	4.5 × 10^-6K^-1

VET Energy yog lub chaw tsim khoom tiag tiag ntawm cov khoom siv graphite thiab silicon carbide nrog cov txheej txheem sib txawv xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam., tuaj yeem muab ntau yam khoom siv rau kev lag luam semiconductor thiab photovoltaic.

Peb pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb saum toj kawg nkaus hauv tebchaws, tuaj yeem muab cov ntaub ntawv tshaj lij tshaj lij rau koj.

Peb tsis tu ncua tsim cov txheej txheem siab heev los muab cov ntaub ntawv zoo tshaj plaws, thiab tau ua haujlwm tawm cov cuab yeej tshwj xeeb patented, uas tuaj yeem ua rau kev sib txuas ntawm cov txheej thiab cov substrate nruj dua thiab tsis tshua muaj detachment.

Zoo siab txais tos koj tuaj xyuas peb lub Hoobkas, cia peb tham ntxiv!