SiC Txheej / Coated Graphite Substrate / Tais rau Semiconductor

Lus piav qhia luv luv:

VET Energy SiC Coated Graphite Susceptor rau Epitaxial Kev Loj Hlob yog cov khoom lag luam ua tau zoo tsim los muab kev ua tau zoo thiab txhim khu kev qha nyob rau lub sijhawm ntev.Nws muaj super zoo kub tsis kam thiab thermal uniformity, siab purity, yaig kuj, ua rau nws zoo meej tov rau wafer ua daim ntaub ntawv.

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SiC txheej / coated ntawm Graphite susceptor rau Semiconductor

SiC Coated Graphite Susceptor yog ib qho tseem ceeb siv nyob rau hauv ntau yam semiconductor manufacturing txheej txheem.Peb siv peb cov cuab yeej patented los ua cov neeg nqa khoom silicon carbide nrog cov purity siab heev, zoo txheej txheej thiab muaj kev pab cuam lub neej zoo, nrog rau cov tshuaj muaj zog thiab thermal stability.

Nta:
· Zoo heev Thermal Shock Resistance
· Zoo heev lub cev poob siab kuj
· Cov tshuaj tiv thaiv zoo heev
· Super Siab Purity
· Muaj nyob rau hauv Complex Shape
· Siv tau nyob rau hauv Oxidizing Atmosphere

Daim ntawv thov:

Yam Khoom Ntawm Base Graphite Khoom:

Pom pom ceev:	1.85g / cm3
Hluav taws xob Resistivity:	11 μΩ
Flexural zog:	49 MPa (500kgf / cm2)
Ntug Hardness:	58
Tshauv:	<5 ppm
Thermal conductivity:	116 W / mK (100 kcal / mhr-℃)

CVD SiC薄膜基本物理性能 Basic Physical Properties ntawm CVD SiCtxheej
性质 / Khoom	典型数值 / Tus nqi zoo
晶体结构 / Crystal Structure	FCC β theem 多晶，主要为 (111) 取向
密度 / Ceev	3.21 g / cm³
硬度 / Hardness	2500 维氏硬度 (500g load)
晶粒大小 / Grain SiZe	2 ~ 10 hli
纯度 / Tshuaj Purity	99.99995%
热ა / Heat Capacity	6 40j kg^-1· K^-1
Sublimation Temperature	2700 ℃
抗弯强度 / Flexural zog	415 MPa RT 4-point
杨氏模量 / Young's Modulus	430 Gpa 4pt khoov, 1300 ℃
Thermal conductivity / thermal conductivity	300 Wm^-1· K^-1
热膨胀系数 / Thermal Expansion (CTE)	4.5 × 10^-6K^-1

VET Energy yog lub chaw tsim khoom tiag tiag ntawm cov khoom siv graphite thiab silicon carbide nrog cov txheej txheem sib txawv xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam., tuaj yeem muab ntau yam khoom siv rau kev lag luam semiconductor thiab photovoltaic.

Peb pab neeg ua haujlwm los ntawm cov tsev kawm tshawb fawb saum toj kawg nkaus hauv tebchaws, tuaj yeem muab cov ntaub ntawv tshaj lij tshaj lij rau koj.

Peb tsis tu ncua tsim cov txheej txheem siab heev los muab cov ntaub ntawv zoo tshaj plaws, thiab tau ua haujlwm tawm cov cuab yeej tshwj xeeb patented, uas tuaj yeem ua rau kev sib txuas ntawm cov txheej thiab cov substrate nruj dua thiab tsis tshua muaj detachment.

Zoo siab txais tos koj tuaj xyuas peb lub Hoobkas, cia peb tham ntxiv!