Barrel Susceptor No Liquid Phase Epitaxy LPE

Barrel susceptor no ka pae wai epitaxy LPE

EPI (Epitaxy)he hana koʻikoʻi i ka hana ʻana i nā semiconductor holomua. Hoʻopili ia i ka waiho ʻana o nā ʻāpana lahilahi o nā mea ma luna o kahi pani no ka hana ʻana i nā hale paʻakikī. Hoʻohana maʻamau ʻia ʻo SiC coated graphite barrel susceptor no EPI ma ke ʻano he susceptors i nā reactors EPI ma muli o kā lākou conductivity thermal maikaʻi loa a me ke kū ʻana i nā wela kiʻekiʻe. MeʻO ka uhi CVD-SiC, lilo ia i mea kū'ē hou aku i ka haumia, erosion, a me ka ha'alulu wela. Loaʻa kēia i ka lōʻihi o ke ola no ka susceptor a me ka maikaʻi o ke kiʻiʻoniʻoni.

ʻO nā mea maikaʻi o kā mākou barrel susceptor no ka wai wai epitaxy LPE:
Hoʻemi ʻia ka hoʻohaumia ʻana:ʻO ke ʻano inert o SiC ke pale aku i nā haumia mai ka hoʻopili ʻana i ka ʻili susceptor, e hōʻemi ana i ka hopena o ka haumia o nā kiʻiʻoniʻoni i waiho ʻia.
Hoʻonui ʻia ka pale ʻana i ka ʻino:ʻOi aku ka maikaʻi o ka SiC i ka erosion ma mua o ka graphite maʻamau, e alakaʻi ana i kahi ola lōʻihi no ka susceptor.
Hoʻomaikaʻi i ke kūpaʻa wela:Loaʻa i ka SiC ka wela wela maikaʻi a hiki ke kū i nā wela kiʻekiʻe me ka ʻole o ka distortion nui.
ʻOi aku ka maikaʻi o ke kiʻiʻoniʻoni:ʻO ka hoʻomaikaʻi ʻana i ke kūpaʻa wela a me ka hoʻohaʻahaʻa ʻana i ka hoʻohaumia ʻana i ka hopena o nā kiʻiʻoniʻoni i waiho ʻia me ka maikaʻi ʻoi aku ka maikaʻi a me ka mana mānoanoa.